娓�(c猫)閲忓墠锛岄鍏堢⒑淇濆緟娓�(c猫)琛ㄩ潰骞插噲鐒�(w煤)姹℃煋銆�
琛ㄩ潰闃绘姉
1 銆佸钩琛屾帰闋樆鎶楁脯(c猫)閲忔硶(Parallel Probe ResistivityMethod)
骞宠鎺㈤牠闃绘姉娓�(c猫)閲忔硶鏄鍚圗OS/ESD锛峉11.11锛�1993妯�(bi膩o)婧�(zh菙n)鐨勬脯(c猫)閲忔柟娉曪紝閫欐槸涓�绋揩閫熺殑娓�(c猫)閲忓钩闈㈠潎鍕绘潗鏂欓浕闃诲�肩殑鏂规硶銆傞�欑ó鏂规硶涔熼仼鍚堜簬澶氬堡鏉愭枡鐨勬脯(c猫)閲�锛屼絾鏄湪闃绘姉鍊煎牨(b脿o)鍛婁腑蹇呴爤娉ㄦ槑娓�(c猫)閲忔檪(sh铆)鐨勬韩搴﹀拰婵曞害姊濅欢銆� A 銆佸皣琛ㄦ斁鍦ㄥ緟娓�(c猫)閲忕殑鐗╅珨琛ㄩ潰銆�
B銆佸皣闁�(k膩i)闂�(gu膩n)瑾�(di脿o)鍒版墍闇�鐨勯浕澹撲綅缃�(10浼忔垨100浼�)
C銆佷互澶х磩5纾呯殑澹撳姏鎸佺簩(x霉)鎸変笅娓�(c猫)閲忔寜閳曪紝姝ゆ檪(sh铆)LCD灞�?x铆)顠禓绀哄嚭娓�(c猫)閲忕殑琛ㄩ潰闃绘姉锛屾韩搴﹀拰鐩稿皪(du矛)婵曞害鍊�锛屾暣鍊�(g猫)娓�(c猫)閲忛亷(gu貌)绋嬪ぇ绱勭偤鍗佷簲绉掔ó銆�
路琛ㄩ潰闃绘姉鍠綅鐐烘瓙濮�/鈻�
路婧害鍠綅鐐烘敐寮�
路鐩稿皪(du矛)婵曞害鍠綅鐐虹櫨鍒嗘瘮
鍦ㄦ瘡娆℃脯(c猫)閲忎腑锛屾寜涓嬫脯(c猫)閲忔寜閳曞悗锛屾脯(c猫)瑭﹀剙灏囬�ｇ簩(x霉)椤ず淇暣娓�(c猫)閲忓��锛屾澗闁�(k膩i)鎸夐垥鍚庣磩鍥涘崄浜旂鍏�(n猫i)锛岄’绀虹殑鏄竴鍊�(g猫)娓�(c猫)閲忓��銆�
2 銆佸悓蹇冪挵(hu谩n)鎺㈤牠闃绘姉娓�(c猫)閲忔硶锛圕oncentric Ring Probe Resistivitymethod锛夛紙鍚屽績鐠�(hu谩n)鎺㈤牠鐐洪伕璩�(g貌u)浠讹級
灏囬�ｇ窔鎻掗牠鎻掑叆琛ㄧ殑鍏╁��(g猫) 3.5姣背鎻掑瓟锛屽苟灏囬钑夋彃闋垏鍚屽績鐠�(hu谩n)鎺㈤牠 (閬歌臣(g貌u)浠�)鐩歌伅(li谩n)銆傚皣鎺㈤牠鏀惧湪寰呮脯(c猫)瑭︾墿楂旇〃闈㈠悗锛屾寜涓嬫寜閳曠磩15绉掗悩鍚�锛屽湪娑叉櫠椤ず灞忎笂灏囬’绀哄嚭姝ｇ⒑鐨勬韩搴﹀拰鐩稿皪(du矛)婵曞害锛屾纰虹殑琛ㄩ潰闃绘姉鍊肩偤娑叉櫠椤ず灞忎笂鐨勮畝鏁�(sh霉)涔樹互 10锛屽柈浣嶇偤姝愬/鈻�銆� 渚嬪锛�
鏅跺睆涓婇’绀虹偤3.5脳10 4 姝愬/鈻�锛涘(sh铆)闅涢樆鎶楀�肩偤3.5脳10 5 姝愬/鈻�銆�
浜�銆佽〃闈㈤浕闃绘脯(c猫)閲忥紙榛�(di菐n)灏�(du矛)榛�(di菐n)锛� (Surface ResistanceMeasurement 锛圧TT锛�)
閫欏��(g猫)娓�(c猫)閲忔柟娉曟槸绗﹀悎EOS/ESD-S4.1娓�(c猫)閲忚姹備締(l谩i)娓�(c猫)閲忕崹(d煤)绔嬩簬鎺ュ湴鐨勫叐榛�(di菐n)涔嬮枔鐨勯浕闃�锛岀敤閫欏��(g猫)娓�(c猫)閲忔柟娉曞緱鍑虹殑娓�(c猫)閲忕祼(ji茅)鏋滆垏琚脯(c猫)鐗╅珨鐨勮檿鐞嗐�佸叐鍊�(g猫)5纾呮帰闋箣闁撶殑璺濋洟绛夊洜绱犳湁闂�(gu膩n)锛屽洜姝�锛屾噳(y墨ng)閬告搰姝ｇ⒑鐨勬脯(c猫)閲忚(gu墨)绋�锛屾瘡娆″湪鍚屾ǎ瑕佹眰鐨勬脯(c猫)閲忔浠朵笅閫�(j矛n)琛屾脯(c猫)瑭︺�� A 銆佸皣閫ｇ窔鎻掗牠鎻掑叆琛ㄧ殑鍏╁��(g猫)3.5姣背鎻掑瓟锛屽苟灏囬钑夋彃闋垏鍏╁��(g猫)5纾呴噸鎺㈤牠鐩歌伅(li谩n)銆�
B銆佹寜鐓ф脯(c猫)閲忚(gu墨)绋嬪皣鍏╁��(g猫)鎺㈤牠鏀剧疆鍦ㄥ緟娓�(c猫)鐗╅珨琛ㄩ潰銆�
C銆侀伕鎿囨墍闇�鐨勯浕澹撳��(10浼忔垨100浼�)
D銆佹寜涓嬮枊(k膩i)闂�(gu膩n)鐩村埌椤ず鍑烘墍閬哥殑闆诲鍊�(10浼忔垨100浼�)锛岀辜绾�(x霉)鎸夎憲闁�(k膩i)闂�(gu膩n)鐩磋嚦鎵�娓�(c猫)闆婚樆锛堝柈浣嶇偤姝� 濮嗭級锛岀浉灏�(du矛)婵曞害鍜屾韩搴﹂’绀哄湪娑叉櫠椤ず灞忎笂銆�
闆婚樆娓�(c猫)閲�
閫欏��(g猫)娓�(c猫)閲忔柟娉曟槸鐢ㄤ簬娓�(c猫)閲忕墿楂旇〃闈竴榛�(di菐n)鑸囪〃闈笂鍙︿竴鎺ュ湴榛�(di菐n)涔嬮枔鐨勮〃闈㈤浕闃�锛屾脯(c猫)閲忔柟娉曠鍚圗OS/ESD S4.1娓�(c猫)閲忔(bi膩o)婧�(zh菙n)銆�
A 銆佸皣鍏╂閫ｇ窔鐨勪竴绔垎鍒ユ彃鍏ヨ〃鐨勫叐鍊�(g猫)3.5姣背鎻掑瓟锛岀劧鍚庡皣鍏朵腑涓�姊濇帴楸烽瓪(y煤)澶�锛屽彟澶栦竴姊濊垏涓�鍊�(g猫)5纾呴噸鐩�(p谩n)褰㈡帰闋浉鑱�(li谩n)銆�
B銆佸皣楸烽瓪(y煤)澶惧瓙鎺ュ埌鎵�鐭ョ殑鎺ュ湴榛�(di菐n)涓婏紝鎸夌収娓�(c猫)閲忚姹傚皣鐩�(p谩n)褰㈡帰闋斁鍦ㄥ緟娓�(c猫)鐗╅珨琛ㄩ潰涓�銆�
C銆佹寜涓嬫脯(c猫)閲忔寜閳曠洿鑷抽浕闃伙紙鍠綅鐐烘瓙濮嗭級銆佺浉灏�(du矛)婵曞害銆佹韩搴﹀�奸’绀哄湪椤ず灞忎笂锛屾脯(c猫)閲忕祼(ji茅)鏋滅鍚圗IA锛孍OS/ESD锛孉NSI锛� IEC-93,CECC,ASTM娓�(c猫)閲忔(bi膩o)婧�(zh菙n)锛屽皪(du矛)浜庨珮闃绘姉鏉愭枡鐨勬脯(c猫)閲忔檪(sh铆)鐐轰繚璀夋脯(c猫)寰楅珮绮惧害娓�(c猫)閲忕祼(ji茅)鏋�锛岄渶娉ㄦ剰涓嶈浣垮叐寮曠窔浜ょ枈锛屼笉瑕佺敤鎵嬫帴瑙告帰闋�锛屽紩绶氬拰琚脯(c猫)鐗╅珨銆�
鏍℃簴(zh菙n)姝ラ
1 銆佽寖鍦嶇偤10 3 鍒�10 12 鍏锋湁绮惧害1%鐨勯樆鎶楅浕姗�銆傞珮绮惧害鐩稿皪(du矛)婵曞害琛�(Relative Humidity Hygrometer)楂樼簿搴︽韩搴﹁〃(High accuracy Thermometer)
2銆佹墦闁�(k膩i)琛ㄨ搵锛屽皬蹇冨垏鑾悕鍌烽浕璺澘涓婂叐姊濋�ｆ帴闆绘簮闁�(k膩i)闂�(gu膩n)鐨勫皫(d菐o)绶�銆�
3銆佹壘鍒伴浕璺澘鍙充笅鏂逛笁鍊�(g猫)鏍℃瑾�(di脿o)绡�(ji茅)鍣�(Calibration Pots)
4銆佷娇琛ㄥ湪閫欎竴鐠�(hu谩n)澧冩浠朵笅璧风⒓1/2灏忔檪(sh铆)锛屽彇寰楄嚜骞宠 鍚庢墠鍙枊(k膩i)濮嬫脯(c猫)瑭�銆�
5銆侀噰鐢ㄦ脯(c猫)瑭﹀剙鑷付鐨勯�ｆ帴绶氫竴绔�ｆ帴涓婇狈榄�(y煤)澶撅紝鍙︿竴绔钑夋彃闋�銆�
6銆佸皣3.5姣背闀�(zh菐ng)鐨勬彃闋彃鍏ヨ〃鐨勬彃鍙�銆�
7銆佺敤楸烽瓪(y煤)澶鹃�ｆ帴闆婚樆鍣ㄥ叐绔�銆�
8銆佷笁鍊�(g猫)鏍℃瑾�(di脿o)绡�(ji茅)鍣紝鏈�涓婇潰鐨勭偤鈥滄繒搴︹�濇脯(c猫)閲�锛屼腑闁撶殑鐐衡�滈樆鎶椻��锛屾渶涓嬮潰鐨勭偤鈥滄韩搴︾敤灏忚櫉(h脿o)铻虹挡鍒�瑾�(di脿o)绡�(ji茅)鈥�銆傞爢鏅�(sh铆)閲�?l猫)杈冮(y脿n)妯甸痪鍙堝{(di脿o)绡�(ji茅)锛岄�嗘檪(sh铆)閲�?l猫)杈冮(y脿n)姒绘。妞{(di脿o)绡�(ji茅)銆�
9銆佹寜涓嬮浕婧愰枊(k膩i)闂�(gu膩n)锛屽悓鏅�(sh铆)姣旇純鈥滄韩搴︹�濓紝鈥滄繒搴︹�濆拰鈥滈浕闃烩�濆��銆�
10銆侀噵鏀鹃浕婧愰枊(k膩i)闂�(gu膩n)锛屽苟鎱㈡參瑾�(di脿o)绡�(ji茅)鐩告噳(y墨ng)鐨勬牎姝ｈ(di脿o)绡�(ji茅)鍣ㄣ��
11銆佸啀娆℃寜涓嬮浕婧愰枊(k膩i)闂�(gu膩n)锛岃瀵烲CD椤ず灞�銆�
12銆佸闇�瑕佸啀鏍℃簴(zh菙n)锛屽彲鍐嶆寜涓嬮浕婧愰枊(k膩i)闂�(gu膩n)鍜岃(di脿o)绡�(ji茅)鏍℃鍣ㄣ��
13銆佽搵涓婅〃钃嬪苟灏囧洓鍊�(g猫)鍥哄畾铻虹挡涓婄穵銆�
14銆佹寜涓嬮浕婧愰枊(k膩i)闂�(gu膩n)纰哄畾琛ㄦ槸鍚﹀伐浣滄甯搞��
闆婚樆娓�(c猫)瑭﹀剙浣跨敤鏂规硶
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鎺ュ湴闆婚樆娓�(c猫)瑭︿娇鐢ㄥ湒瑙ｏ細
a锛夊(sh铆)闅涙搷浣�
b锛夌瓑鏁堝師鐞�
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3锛夊皣娓�(c猫)閲�?j墨)x姘村钩鏀剧疆鍚�锛屾鏌ユ娴佽▓(j矛)鐨勬寚閲濇槸鍚︽寚鍚戜腑蹇冪窔锛屽惁鍓囪(di脿o)绡�(ji茅)鈥滈浂浣嶈(di脿o)鏁村櫒鈥濅娇娓�(c猫)閲�?j墨)x鎸囬嚌鎸囧悜涓績绶�銆�
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