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鎮ㄥソ锛屾杩庝締鍒扮董搴浕瀛愬競鍫寸恫(w菐ng) 鐧婚寗 | 鍏嶈不娉ㄥ唺

纭呭熀鑲栫壒鍩轰簩妤电
闁辫畝锛�4470鏅傞枔锛�2017-07-19 09:35:19

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纭呭熀鑲栫壒鍩哄嫝澹樹簩妤电绲�(ji茅)妲�(g貌u)

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    灏嶄簬 S-SBD 鑰岃█锛屽寤跺堡婵冨害澧炲姞锛屽皫(d菐o)閫氬闄嶆笡灏�锛屽弽鍚戞紡娴佽畩澶�锛岀壒寰佸皫(d菐o)閫氶浕闃昏畩灏�锛岀祼(ji茅)闆诲璁婂ぇ锛涘苟涓� S-SBD闅ㄨ憲澶栧欢灞ゅ帤搴﹀鍔�锛屽皫(d菐o)閫氬闄嶈畩澶�锛屽弽鍚戞紡娴佹笡灏忥紝鐗瑰緛灏�(d菐o)閫氶浕闃昏畩澶�锛岀祼(ji茅)闆诲璁婂ぇ銆傜偤浜嗛仈(d谩)鍒板闅� 45V銆�100V 鍙嶅悜鑰愬鐨� SBD锛屾牴鎿�(j霉)浠ュ線绉戞妧宸ヤ綔缍�(j墨ng)椹�锛岃ō(sh猫)瑷堟檪 SBD 鐨勫弽鍚戣�愬鍒嗗垾閬�(d谩)鍒� 52V銆�120V 浠ヤ笂銆傛牴鎿�(j霉)涓婇潰涓夊�嬪紡瀛愬彲浠ュ垵姝ヤ及娓嚭鍏╃ó鍙嶅悜鑰愬鐨凷BD 鐨勫寤跺堡婵冨害鍜屽帤搴﹁寖鍦�銆�

    D-SBD 涓昏鐗归粸鏄畠鐨勫寤跺堡鐢� N澶栧欢灞ゅ拰 N 澶栧欢灞ゅ叐閮ㄥ垎绲勬垚锛孨 澶栧欢灞ゆ懟闆滄績搴﹂珮浜� N-澶栧欢灞�锛屼絾閬�(yu菐n)浣庝簬 N瑗簳銆傝垏 S-SBD 鐩告瘮锛屽鍔犱竴灞ゆ績搴﹁純楂樼殑 N 澶栧欢灞や娇琛ㄩ潰 RESURF 姊濅欢鐧�(f膩)鐢熶竴瀹氱殑璁婂寲锛屼娇琛ㄩ潰闆诲牬鍒嗗竷鏀硅畩锛屽湪鎻愰珮绺卞悜鑰愬鐨勫悓鏅傞檷浣庡皫(d菐o)閫氶浕闃�銆侱-SBD 鐨勭祼(ji茅)妲�(g貌u)鍙冩暩(sh霉)涓昏鏈夊櫒浠堕暦搴� L锛汵灞ら洔璩�(zh矛)婵冨害 Nd1锛屽帤搴� tepi1锛汵 澶栧欢灞ら洔璩�(zh矛)婵冨害 Nd2锛屽帤搴� tepi2锛涙哀鍖栧堡鍘氬害 tox锛涗繚璀�(h霉)鐠�(hu谩n)绲�(ji茅)娣� xj锛屽搴� W锛屼綅缃� d銆�

    澶栧欢灞ゅ劒(y艒u)鍖�

    澶栧欢灞ゅ帤搴�

    鐣�(d膩ng)鍣ㄤ欢灏哄鐐哄畾鍊兼檪锛岀劇璜栬倴鐗瑰熀鍕㈠楂樺害 肖sbh鏄� 0.64eV 閭勬槸 0.78eV D-SBD锛岄毃钁� N-澶栧欢灞ょ殑鍘氬害璁婂ぇ锛孌-SBD 鐨勬搳绌块浕澹撳拰鐗瑰緛灏�(d菐o)閫氶浕闃诲潎璁婂ぇ锛涚浉鍙嶅湴锛岄毃钁� N 澶栧欢灞ょ殑鍘氬害璁婂ぇ锛孌-SBD 鐨勬搳绌块浕澹撳拰鐗瑰緛灏�(d菐o)閫氶浕闃诲潎璁婂皬銆�

    鐣�(d膩ng)tepi1鑸噒epi2涔嬪拰鍙婂櫒浠跺昂瀵哥偤瀹氬�兼檪锛屽皪浜庤倴鐗瑰熀鍕㈠楂樺害鐐�0.64eV D-SBD锛屽皫(d菐o)閫氬闄嶉毃钁� N-澶栧欢灞ょ殑鍘氬害澧炲姞鐣ユ湁澧炲姞锛涚暥(d膩ng) tepi12渭m锛岄浂鍋忔檪绲�(ji茅)闆诲鍩烘湰涓嶉毃 tepi1鑸� tepi2璁婂寲銆傚皪浜庤倴鐗瑰熀鍕㈠楂樺害鐐� 0.78eV D-SBD锛屽皫(d菐o)閫氬闄嶉毃钁� N-澶栧欢灞ょ殑鍘氬害澧炲姞鐣ユ湁澧炲姞锛涚暥(d膩ng) tepi14渭m锛岄浂鍋忔檪绲�(ji茅)闆诲鍩烘湰涓嶉毃 tepi1鑸� tepi2璁婂寲銆傛墍浠ュ湪婊胯冻鑰愬鎯呮硜涓嬬嵅寰楃洝閲忓皬鐗瑰緛灏�(d菐o)閫氶浕闃诲拰灏�(d菐o)閫氬闄嶈垏绲�(ji茅)闆诲锛屾湰鏂囧皪浜庤倴鐗瑰熀鍕㈠楂樺害鐐� 0.64eV D-SBD 鐨勫寤跺堡鍘氬害閬�?銆傜熬o璜栦换浣曞櫒浠跺昂瀵� tepi1=2渭m锛宼epi2=1渭m锛涘皪浜庤倴鐗瑰熀鍕㈠楂樺害鐐� 0.78eV D-SBD 鐨勫寤跺堡鍘氬害閬�?銆傜熬o璜栦换浣曞櫒浠跺昂瀵� tepi1=1渭m锛宼epi2=9渭m銆�

    澶栧欢灞ゆ績搴�

    鐣�(d膩ng)鍏朵粬绲�(ji茅)妲�(g貌u)鍙冩暩(sh霉)鐐哄畾鍊兼檪锛屽皪浜庤倴鐗瑰熀鍕㈠楂樺害鐐� 0.64eV D-SBD 闅ㄨ憲 N-澶栧欢灞ょ殑婵冨害璁婂ぇ锛屾搳绌块浕澹撳拰鐗瑰緛灏�(d菐o)閫氶浕闃诲潎璁�??锛涘皪浜庤倴鐗瑰熀鍕㈠楂樺害鐐� 0.78eV D-SBD 闅ㄨ憲 N澶栧欢灞ょ殑婵冨害璁婂ぇ锛屾搳绌块浕澹撹畩灏�锛岀劧鑰岀壒寰佸皫(d菐o)閫氶浕闃诲墖鐣ユ湁澧炲ぇ銆�

    鐣�(d膩ng)N澶栧欢灞ゆ績搴﹀強鍣ㄤ欢灏哄鐐哄畾鍊兼檪锛屽皪浜庤倴鐗瑰熀鍕㈠楂樺害鐐�0.64eV D-SBD 闅ㄨ憲 N澶栧欢灞ゆ績搴﹁畩澶э紝灏�(d菐o)閫氬闄嶈畩灏�锛岄浂鍋忔檪绲�(ji茅)闆诲鐣ユ湁澧炲姞銆傚皪浜庤倴鐗瑰熀鍕㈠楂樺害鐐� 0.78eV D-SBD锛岀暥(d膩ng) L=1778渭m 鏅傞毃钁� N澶栧欢灞ょ殑婵冨害璁婂ぇ锛屽皫(d菐o)閫氬闄嶆笡??锛涚暥(d膩ng) L=2040渭m 鍜� L=2290渭m 鏅傞毃钁� N澶栧欢灞ょ殑婵冨害璁婂ぇ锛屽皫(d菐o)閫氬闄嶈畩澶�锛涗絾鏄皫(d菐o)閫氬闄嶉毃钁楀寤跺堡婵冨害璁婂寲涓�鍊嬫暩(sh霉)閲忕礆鍍呰畩鍖栫磩鐐� 0.004V銆傜劧鑰岃倴鐗瑰熀鍕㈠楂樺害鐐� 0.78eV D-SBD 闅ㄨ憲 N-澶栧欢灞ょ殑婵冨害璁婂ぇ锛岄浂鍋忔檪绲�(ji茅)闆诲鏄庨’澧炲姞銆傛墍浠ュ湪婊胯冻鑰愬瑕佹眰鎯呮硜涓嬩互闄嶄綆鐗瑰緛灏�(d菐o)閫氶浕闃汇�佸皫(d菐o)閫氬闄嶈垏绲�(ji茅)闆诲鎶樿》锛屾湰鏂囧皪浜庤倴鐗瑰熀鍕㈠楂樺害鐐� 0.64eV D-SBD 鐨� N-澶栧欢灞ょ殑婵冨害閬�?銆傚瘨?d膩ng) L=1778渭m 鏅� Nd1=6.1脳10cm锛涚暥(d膩ng) L=2040渭m 鍜孡=2290渭m 鏅� Nd1=5脳10cm銆傚皪浜庤倴鐗瑰熀鍕㈠楂樺害鐐� 0.78eV D-SBD 鐨� N-澶栧欢灞ょ殑婵冨害閬�?銆傜熬o璜栦换浣曞櫒浠跺昂瀵� Nd1=1脳10cm銆�

    D-SBD 鐨勬搳绌块浕澹撳拰鐗瑰緛灏�(d菐o)閫氶浕闃婚毃钁� N 澶栧欢灞ゆ績搴﹁畩鍖栥�傜暥(d膩ng)鍏朵粬绲�(ji茅)妲�(g貌u)鍙冩暩(sh霉)鐐哄畾鍊兼檪锛屽皪浜庤倴鐗瑰熀鍕㈠楂樺害鐐� 0.64eV D-SBD 闅ㄨ憲 N 澶栧欢灞ょ殑婵冨害璁婂ぇ锛屾搳绌块浕澹撳拰鐗瑰緛灏�(d菐o)閫氶浕闃诲潎璁�??锛涘皪浜庤倴鐗瑰熀鍕㈠楂樺害鐐� 0.78eV D-SBD 闅ㄨ憲 N 澶栧欢灞ょ殑婵冨害璁婂ぇ锛屾搳绌块浕澹撹畩灏�锛岀劧鑰岀壒寰佸皫(d菐o)閫氶浕闃诲墖鐣ユ湁澧炲ぇ銆�

    鐣�(d膩ng) N-澶栧欢灞ゆ績搴﹀強鍣ㄤ欢灏哄鐐哄畾鍊兼檪锛岀劇璜栬倴鐗瑰熀鍕㈠楂樺害 肖sbh 26 鏄� 0.64eV 閭勬槸 0.78eV D-SBD锛岄毃钁� N 澶栧欢灞ゆ績搴﹁畩澶�锛屽皫(d菐o)閫氬闄嶈畩灏忥紝闆跺亸鏅傜祼(ji茅)闆诲鐣ユ湁澧炲姞銆�

    绲�(ji茅)绲傜瑷�(sh猫)瑷�

    SBD 鍦ㄨ倴鐗瑰熀鎺ヨЦ鐨勯倞绶ｉ浕鍫寸窔闆嗕腑锛岄浕鍫村挤搴﹀鍔犲皫(d菐o)鑷村嫝澹橀檷浣庯紝鍥犻毀閬撴晥鎳�(y墨ng)鏄庨’澧炲姞浜嗗弽鍚戞紡闆绘祦锛屽弽鍚戞埅姝㈢壒鎬ц畩杌燂紝浣� SBD 鐨勮�愬閬�(yu菐n)浣庝簬骞抽潰绲�(ji茅)銆傜偤绶╄В閭婄罚闆诲牬绶氶泦涓晥鎳�(y墨ng)锛岄�氬父鏈夊叐绋妧琛�(sh霉)璺緫锛�(1)鏀瑰杽鑰楃洝灞ゆ洸鐜囷紝浣胯〃闈㈣�楃洝灞ゆ┇鍚戞摯灞曞埌鍫存澘閭婄罚涔嬪锛�(2)浣跨敤灞�閮ㄦ哀鍖�(local oxidation of silicon锛孡OCOS)宸ヨ棟锛屽湪鑲栫壒鍩烘帴瑙搁倞绶ｈ檿鐢熸垚浜屾哀鍖栫灞�銆傜祼(ji茅)绲傜澶ц嚧鍒嗛濡傚湒 3.9 鎵�绀猴紝鍏朵腑淇濊(h霉)鐠�(hu谩n)鐗瑰垾閬╃敤绺卞悜鍣ㄤ欢锛岃ō(sh猫)瑷堥棞(gu膩n)閸垫槸鍎�(y艒u)鍖栫挵(hu谩n)娣卞害鑸囧�嬫暩(sh霉)鍜岀挵(hu谩n)闁撹窛浣垮緱涓荤祼(ji茅)鍜岀挵(hu谩n)绲�(ji茅)鍚屾檪閬�(d谩)鍒拌嚚鐣屾搳绌块浕鍫达紝鍙娇鍣ㄤ欢鑰愬鍖栥�傞爤鎸囧嚭鐠�(hu谩n)鏁�(sh霉)澧炲锛屽櫒浠惰�愬闈炵窔鎬ф彁楂�銆佽嚜韬潰绌嶈秺澶у拰浠跨湡鏁�(sh霉)鎿�(j霉)涔熸�ュ妵鍦板鍔犮��

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    灏嶄簬 SBD 渚嗚锛屾鍚�?q奴)顬碱瀱?PF)鏄皫(d菐o)閫氬闄嶈垏灏�(d菐o)閫氶浕娴�(IA)涔樼⿳锛屽畠灏嶇附楂斿姛鑰楃殑褰遍熆銆備竴鑸� IA鏄爯(y霉)鍏堣ō(sh猫)瀹氱殑锛屽墖闄嶄綆灏�(d菐o)閫氬闄嶆槸闄嶄綆 PF鐨勯�斿緫銆備竴鑸�氶亷澧炲ぇ鏈夋簮鍗�(q奴)闈㈢⿳渚嗛檷浣� VF锛岄�欒垏鍣ㄤ欢灏忓瀷鍖栥�佺祼(ji茅)闆诲鏈�灏忓寲銆佺府鐭弽鍚戞仮寰�(f霉)鏅傞枔鐩哥煕鐩�銆傜偤浜嗛檷浣� VF锛�

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    鑲栫壒鍩哄嫝澹樹簩妤电鐨勮�楃洝灞ゅ帤搴﹀儏鍍呮暩(sh霉)鍊嬬磵绫筹紝闅ㄨ憲鍙嶅悜鍋忓璁婂ぇ闅х┛姗熺巼鍗囬珮锛屾槗鐧�(f膩)鐢熻粺鎿婄┛锛屾墍浠ョ鍩� SBD 鐨勮�愬閮藉湪 100V 浠ュ収(n猫i)銆�

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