銆�銆�鑶滃帤鍎�鍙�鎳�(y墨ng)鐢ㄤ簬鍦ㄧ窔鑶滃帤娓�(c猫)閲�,娓�(c猫)姘у寲鐗�,SiNx,鎰熷厜淇濊��(h霉)鑶滃拰鍗婂皫(d菐o)楂旇啘.涔熷彲浠ョ敤渚�(l谩i)娓�(c猫)閲忛崓?c猫)闃�?閶�,閵�,闄剁摲鍜屽�戞枡绛変笂鐨勭矖绯欒啘灞�. 钖勮啘琛ㄩ潰鎴栫晫闈㈢殑鍙嶅皠鍏夋渻(hu矛)鑸囧緸鍩哄簳鐨勫弽灏勫厜鐩稿共娑�,骞叉秹鐨勭櫦(f膩)鐢熻垏鑶滃帤鍙婃姌鍏夌郴鏁�(sh霉)绛夋湁闂�(gu膩n),鍥犳�ゅ彲閫氶亷(gu貌)瑷�(j矛)绠楀緱鍒拌杽鑶滅殑鍘氬害.鍏夊共娑夋硶鏄�涓�绋�鐒�(w煤)鎼�,绮剧⒑涓斿揩閫熺殑鍏夊��(xu茅)钖勮啘鍘氬害娓�(c猫)閲忔妧琛�(sh霉),钖勮啘娓�(c猫)閲忕郴绲�(t菕ng)閲囩敤鍏夊共娑夊師鐞嗘脯(c猫)閲忚杽鑶滃帤搴�銆�

銆�銆�1,鍙�浠ユ��(c猫)閲忓�氬堡鑶滀腑姣忎竴灞ょ殑鍘氬害

銆�銆�2,涓夌董鐨勫帤搴﹀瀷璨�

銆�銆�3,閬�(yu菐n)绋嬫帶鍒跺拰鍦ㄧ窔娓�(c猫)閲�

銆�銆�4,鍙�鍋�150mm or 300mm 鐨勫ぇ鑼冨湇鐨勬巸鎻忔脯(c猫)瑭�

銆�銆�5,璞愬瘜鐨勬潗鏂欏韩(k霉):鎿嶄綔杌熶欢鐨勬潗鏂欏韩(k霉)甯舵湁澶ч噺鏉愭枡鐨刵鍜宬鏁�(sh霉)鎿�(j霉),鍩烘湰涓婄殑甯哥敤鏉愭枡閮藉寘鎷�鍦ㄩ�欏��(g猫)鏉愭枡搴�(k霉)涓�.鐢ㄦ埗(h霉)涔熷彲浠ュ湪鏉愭枡搴�(k霉)涓�杓稿叆娌�(m茅i)鏈夌殑鏉愭枡.

銆�銆�6,杌熶欢鎿嶄綔绨�(ji菐n)鍠�,娓�(c猫)閫熷揩:鑶滃帤娓�(c猫)閲�?j墨)x鎿嶄綔闈炲父绨�(ji菐n)鍠�,娓�(c猫)閲忛�熷害蹇�:100ms-1s.

銆�銆�7,杌熶欢甯舵湁妲�(g貌u)寤烘潗鏂欑祼(ji茅)妲�(g貌u)鐨勬嫇灞曞姛鑳�,鍙�灏�(du矛)鍠�/澶氬堡钖勮啘鏁�(sh霉)鎿�(j霉)閫�(j矛n)琛屾摤鍚堝垎鏋�,鍙�灏�(du矛)钖勮啘鏉愭枡閫�(j矛n)琛岄爯(y霉)鍏堟ā鎿�瑷�(sh猫)瑷�(j矛).

銆�銆�8,杌熶欢甯舵湁鍙�鍗囩��(j铆)鐨勬巸鎻忓姛鑳�,閫�(j矛n)琛岃杽鑶滀簩缍�鐨勬��(c猫)瑭�,骞跺皣绲�(ji茅)鏋滀互2D鎴�3D鐨勫舰寮忛’绀�.杌熶欢鍏朵粬鐨勫崌绱�(j铆)鍔熻兘閭勫寘鎷�鍦ㄧ窔鍒嗘瀽杌熶��,閬�(yu菐n)绋嬫帶鍒舵ā濉婄瓑

銆�銆�鍘氬害娓�(c猫)閲�:10绱嶇背-250寰�绫�; 鍙�浠ラ伕鎿�250nm-1100nm闁撲换涓�娉㈤暦(zh菐ng),涔熷彲鍦ㄨ┎鑼冨湇鍏�(n猫i)閬告搰澶氭尝闀�(zh菐ng)鍒嗘瀽;

銆�銆�娉㈤暦(zh菐ng): 250-1100nm

銆�銆�鍘氬害鑼冨湇: 10nm--250m

銆�銆�鍒嗚鲸鐜�: 0,1nm

銆�銆�閲嶅京(f霉)鎬�: 0,3nm

銆�銆�婧�(zh菙n)纰虹巼: <1[%] (100nm--100m)

銆�銆�娓�(c猫)瑭︽檪(sh铆)闁�: 100ms -- <1s

銆�銆�鍒嗘瀽灞ゆ暩(sh霉): 1-- 4

銆�銆�闆㈠厜绾栬窛闆�: 1-5mm

銆�銆�闆㈤彙闋�璺濋��: 5mm-- 100mm

銆�銆�鍏ュ皠瑙掑害: 90掳

銆�銆�鍏夋枒榛�(di菐n)澶у皬: 400m

銆�銆�寰�鍏夋枒鎵嬫��: 鑸囬’寰�閺¤��(li谩n)鐢�,1-- 20m with Microscope 10x/20x/50x Magnification and MFA-Adapter;

銆�銆�鍏夌簴闀�(zh菐ng)搴�: 2m (other lengthes on request)

銆�銆�鎺ュ彛: USB 1.1 (RS-232)

銆�銆�闆绘簮闇�姹�: 12 VDC@1,2A, 220 VAC 50/60 Hz

銆�銆�灏哄��: 180mm x 152 mm x 263mm

銆�銆�绺介噺: 3.5 kg

銆�銆�鑶滃帤鍎�涓昏�佹��(y墨ng)鐢ㄤ簬鏅剁墖鎴栫幓鐠冭〃闈㈢殑浠嬮浕绲曠罚灞�(SiO2, Si3N4, Photo-resist, ITO, ...); 鏅剁墖鎴栫幓鐠冭〃闈㈣秴钖勯噾灞�灞�(Ag, Al, Au, Ti, ...); DLC(Diamond Like Carbon)纭�娑傚��;SOI纭呯墖; MEMs 鍘氬堡钖勮啘(100m up to 250m); DVD/CD 娑傚堡; 鍏夊��(xu茅)閺￠牠娑傚堡; SOI纭呯墖; 閲戝爆绠�; 鏅剁墖鑸嘙ask闁撴埃灞�; 娓涜杽鐨勬櫠鐗�(< 120m); 鐡跺瓙鎴栨敞灏勫櫒绛夊付寮у害鐨勬秱灞�; 钖勮啘宸ユキ(y猫)鐨勫湪绶氶亷(gu貌)绋嬫帶鍒剁瓑绛夎ū澶氬牬(ch菐ng)鍚堛��