銆�銆�纭呯祫浠�
銆�銆�Si BiCMOS鐐轰富娴�
銆�銆�浠ョ鐐哄熀鏉愮殑闆嗘垚闆昏矾鍏辨湁Si BJT(Si-Bipolar Junction Transistor)銆丼i CMOS銆佽垏绲�(ji茅)鍚圔ipolar鑸嘋MOS鐗规�х殑Si BiCMOS(Si Bipolar Complementary Metal Oxide Semiconductor)绛夐銆傜敱浜庣鏄暥(d膩ng)鍓嶅崐灏�(d菐o)楂旂敘(ch菐n)妤�(y猫)鎳�(y墨ng)鐢ㄦ渶鐐烘垚鐔熺殑鏉愭枡锛屽洜姝�锛屼笉璜栧湪鐢�(ch菐n)閲忔垨鍍�(ji脿)鏍兼柟闈㈤兘妤靛叿鍎�(y艒u)鍕�(sh矛)銆傚偝绲�(t菕ng)涓婁互纭呬締(l谩i)鍒朵綔鐨勬櫠楂旂澶氶噰鐢˙JT鎴朇MOS锛屼笉閬�(gu貌)锛岀敱浜庣鏉愭枡娌�(m茅i)鏈夊崐绲曠罚鍩烘澘锛屽啀鍔犱笂绲勪欢鏈韩鐨勫鐩婅純浣庯紝鑻ヨ鎳�(y墨ng)鐢ㄥ湪楂橀牷娈垫搷浣滅殑鐒�(w煤)绶氶�氫俊IC鍒堕��锛屽墖闇�閫�(j矛n)涓�姝ユ彁鍗囧叾楂橀牷闆绘�э紝闄や簡瑕佹敼鍠勬潗鏂欑祼(ji茅)妲�(g貌u)渚�(l谩i)鎻愰珮绲勪欢鐨刦T锛岄倓蹇呴爤钘夊姪婧濇Ы闅旈洟绛夊埗绋嬩互鎻愰珮闆昏矾闁撶殑闅旈洟搴﹁垏Q鍊�锛屽姝や竴渚�(l谩i)锛屽叾鍒剁▼灏囨渻(hu矛)鏇寸偤寰�(f霉)闆�锛屼笖涓嶈壇鐜囪垏鎴愭湰涔熷皣澶у箙鎻愰珮銆�
銆�銆�鍥犳锛岀洰鍓嶅浠ュ叿鏈変綆鍣伈銆侀浕瀛愮Щ鍕�(d貌ng)閫熷害蹇�佷笖闆嗘垚搴﹂珮鐨凷i BiCMOS鍒剁▼鐐轰富銆傝�屼富瑕佺殑鎳�(y墨ng)鐢ㄥ墖浠ヤ腑闋绘ā濉婃垨浣庡堡鐨勫皠闋绘ā濉婄偤涓�锛岃嚦浜庡皪(du矛)浜庝綆鍣伈鏀惧ぇ鍣�銆佸姛鐜囨斁澶у櫒鑸囬枊闂�(gu膩n)鍣ㄧ瓑灏勯牷鍓嶇绲勪欢鐨勫埗閫犱粛鍔涙湁鏈���
銆�銆�SiGe鍒剁▼宥勯湶闋
銆�銆�1980骞翠唬IBM鐐烘敼閫�(j矛n)Si鏉愭枡鑰屽姞鍏e锛屼互渚垮鍔犻浕瀛愭祦鐨勯�熷害锛屾笡灏戣�楄兘鍙婃敼閫�(j矛n)鍔熻兘锛屽嵒鎰忓鎴愬姛鐨勭祼(ji茅)鍚堜簡Si鑸嘒e銆傝�岃嚜98骞碔BM瀹ｅ竷SiGe閭佸叆閲忕敘(ch菐n)鍖栭殠娈靛悗锛岃繎鍏�銆佷笁骞翠締(l谩i)锛孲iGe宸叉垚浜嗘渶琚噸瑕栫殑鐒�(w煤)绶氶�氫俊IC鍒剁▼鎶�琛�(sh霉)涔嬩竴銆�
銆�銆�渚濇潗鏂欑壒鎬т締(l谩i)鐪�锛孲iGe楂橀牷鐗规�ц壇濂�锛屾潗鏂欏畨鍏ㄦ�т匠锛屽皫(d菐o)鐔辨�уソ锛岃�屼笖鍒剁▼鎴愮啛銆佹暣鍚堝害楂�锛屽叿鎴愭湰杓冧綆涔嬪劒(y艒u)鍕�(sh矛)锛屾彌瑷�涔嬶紝SiGe涓嶄絾鍙互鐩存帴鍒╃敤鍗婂皫(d菐o)楂旂従(xi脿n)鏈�200mm鏅跺湏鍒剁▼锛岄仈(d谩)鍒伴珮闆嗘垚搴�锛屾摎(j霉)浠ュ壍(chu脿ng)閫犵稉(j墨ng)婵�(j矛)瑕�(gu墨)妯�锛岄倓鏈夊缇嶨aAs鐨勯珮閫熺壒鎬с�傞毃钁楄繎渚�(l谩i)IDM澶у粻鐨勬姇鍏�锛孲iGe 鎶�琛�(sh霉)宸查�愭鍦ㄦ埅姝㈤牷鐜�(fT)鑸囨搳绌块浕澹�(Breakdown voltage)閬�(gu貌)浣庣瓑鍟�(w猫n)椤岀嵅寰楁敼鍠勮�屾棩瓒ㄥ(sh铆)鐢�銆傜洰鍓�锛岄�欓爡(xi脿ng)鐢盜BM鎵�闁嬬櫦(f膩)鍑轰締(l谩i)鐨勫埗绋嬫妧琛�(sh霉)宸叉暣鍚堜簡楂樻晥鑳界殑SiGe HBT(Heterojunction Bipolar Transistor)3.3V鍙�0.5渭m鐨凜MOS鎶�琛�(sh霉)锛屽彲浠ュ埄鐢ㄤ富鍕�(d貌ng)鎴栬鍕�(d貌ng)绲勪欢锛屽緸浜嬫ā鎿�銆丷F鍙婃贩鍚堜俊铏�(h脿o)鏂归潰鐨勯厤缃噳(y墨ng)鐢ㄣ��
銆�銆�灏�(du矛)浜庣劇(w煤)绶氶�氫俊灏勯牷IC鎳�(y墨ng)鐢ㄨ�岃█锛孲iGe鎶�琛�(sh霉)鍏锋湁鑹ソ鐨勭窔鎬у害銆佷綆鍣伈銆佸揩閫熺瓑鐗规��锛屽彲閬╃敤浜庢墜姗�(j墨)灏勯牷鍓嶇濡侺NA銆丮ixer绛夈�傚洜姝�锛岄毃钁桽iGe鍒剁▼鎶�琛�(sh霉)鐨勬�ц兘鏃ヨ定瀹屽杽锛屽啀鍔犱笂闆嗘垚搴﹂珮锛屼娇寰楀叏鐞冨皠闋昏姱鐗囧ぇ寤犺垏鏅跺湏浠ｅ伐寤犲晢鐨嗗凡闄哥簩(x霉)鎶曞叆姝や竴鎶�琛�(sh霉)鐨勭櫦(f膩)灞曘��
銆�銆�RF CMOS钃勫嫝(sh矛)寰呯櫦(f膩)
銆�銆�鐩＄绱旂鐨凜MOS鍒剁▼琚獚(r猫n)鐐哄儏閬╃敤浜庢暩(sh霉)瀛楀姛鑳介渶姹傝純澶氱殑瑷�(sh猫)瑷�(j矛)锛岃�屼笉閬╃敤浜庝互妯℃摤闆昏矾鐐轰富鐨勫皠闋籌C瑷�(sh猫)瑷�(j矛)锛屼笉閬�(gu貌)姝风稉(j墨ng)鍗佸咕骞寸殑鍔姏鍚�锛岄毃钁桟MOS鎬ц兘鐨勬彁鍗�銆佹櫠鍦撲唬宸ュ粻鍦�0.25mm浠ヤ笅鍒剁▼鎶�琛�(sh霉)鐨勯厤鍚�銆佷互鍙婄劇(w煤)绶氶�氫俊鑺墖鏁村悎瓒ㄥ嫝(sh矛)鐨勫紩闋�(l菒ng)涓�锛孯F CMOS鍒剁▼涓嶅儏鏄(xu茅)鐣岀爺绌剁殑鐔遍杸瑾查锛屼篃寮曡捣浜嗘キ(y猫)鐣岀殑闂�(gu膩n)娉ㄣ�傞噰鐢≧F CMOS鍒剁▼鐨勫ソ铏�锛岀暥(d膩ng)鐒舵槸鍙互灏囧皠闋汇�佸熀闋昏垏瀛樺劜(ch菙)鍣ㄧ瓑绲勪欢鍚堣�岀偤涓�鐨勯珮鏁村悎搴�锛屽苟鍚屾檪(sh铆)闄嶄綆绲勪欢鎴愭湰銆備絾鏄櫏绲�(ji茅)榛�(di菐n)浠嶅湪浜嶳F CMOS鏄惁鑳借В姹洪珮鍣伈銆佷綆绲曠罚搴﹁垏Q鍊�銆佽垏闄嶄綆鏀瑰杽鎬ц兘鎵�澧炲姞鍒剁▼鎴愭湰绛夊晱(w猫n)椤�锛屾墠鑳芥豢瓒崇劇(w煤)绶氶�氫俊灏勯牷闆昏矾鍤�(y谩n)鏍肩殑瑕佹眰銆�
銆�銆�鐩墠宸查噰鐢≧F CMOS鍒朵綔灏勯牷IC鐨勭敘(ch菐n)鍝佸浠ュ皪(du矛)灏勯牷瑕�(gu墨)鏍艰姹傝純鐐哄鏉剧殑Bluetooth鑸嘩LAN灏勯牷IC锛屼緥濡侰SR銆丱ki銆丅roadcom绛塀luetooth鑺墖寤犲晢鐨嗗凡鎺ㄥ嚭浣跨敤CMOS鍒堕�犵殑Bluetooth鍌抽�佸櫒锛涜�孉theros銆丒nvara绛塛LAN鑺墖寤犲晢涔熷湪鏈�杩戞帹鍑哄叏CMOS鍒剁▼鐨勫妯LAN(.11b/g/a)灏勯牷鑺墖绲�銆備笉閬�(gu貌)锛岀敱浜庢墜姗�(j墨)鐢ㄥ皠闋籌C瑕�(gu墨)鏍奸潪甯稿毚(y谩n)鏍�锛屽埌鐩墠鐐烘锛岄櫎浜哠ilicon Labs浠ユ暩(sh霉)瀛楁妧琛�(sh霉)渚�(l谩i)寮�(qi谩ng)鍖栦綆涓牷鑷冲熀闋绘烤娉㈠櫒鍙婃暩(sh霉)瀛楅牷閬撻伕鎿囨烤娉㈠櫒鍔熻兘锛屼互闄嶄綆CMOS鍣伈閬�(gu貌)楂樼殑鍟�(w猫n)椤屾墍鐢熺敘(ch菐n)鐨凙ero 浣庝腑闋� GSM/GPRS鑺墖绲勫锛屽緢灏�?g貌u)S鍟嗕互姝ゆ妧琛�(sh霉)鍒堕�犳墜姗�(j墨)灏勯牷IC銆傚啀鑰咃紝鐢变簬鎵嬫(j墨)鍒堕�犲晢灏�(du矛)鍏跺彲闈犲害鐨勭枒鎱粛娣�锛屾晠闄や簡闊撳湅(gu贸)涓夋槦闆诲瓙閲囩敤Silicon Labs鐨凙ero灏勯牷鑺墖绲勫锛屽咕涔庢湭鏇捐伣(t墨ng)鑱炴墜姗�(j墨)鍒堕�犲粻閲囩敤CMOS鐢熺敘(ch菐n)鐨凴F鑺墖銆傜敱姝よ涔嬶紝RF CMOS娆插湪鎵嬫(j墨)灏勯牷IC鍒剁▼涓惗鍗犱竴甯箣鍦颁粛鏈夎ū澶氫簾寰呭厠鏈嶇殑闅滅銆�
銆�銆�鍖栧悎鐗╁崐灏�(d菐o)楂旓細GaAs
銆�銆�闄や簡纭呭埗绋嬬殑鑺墖涔嬪锛屼互鐮峰寲閹靛埗绋嬫墍鐢熺敘(ch菐n)鐨勮姱鐗囦害鏃╁氨琚ぇ閲忛亱(y霉n)鐢ㄥ湪琛�(w猫i)鏄熼�氫俊銆佽粛浜嬫鍣ㄧ瓑鍦�(gu贸)闃插伐妤�(y猫)涓婏紝鍙槸鍏舵噳(y墨ng)鐢ㄨ寖鍦嶇嫻闅�锛屼笖鐢�(ch菐n)妤�(y猫)绲�(ji茅)妲�(g貌u)杓冪偤灏侀枆锛屼互鑷翠簬甯傚牬(ch菐ng)闁嬫嫇涓嶆槗銆備笉閬�(gu貌)锛岄毃钁楄繎骞翠締(l谩i)鐒�(w煤)绶氶�氫俊鐨勭櫦(f膩)灞�锛岀牱鍖栭幍鍒堕�犵殑IC閫愭几寤ｇ偤鎳�(y墨ng)鐢ㄥ湪鐒�(w煤)绶氶�氫俊鍔熺巼鏀惧ぇ绲勪欢鐨勫埗閫�銆�
銆�銆�渚濇潗鏂欑壒鎬т締(l谩i)鐪�锛岀牱鍖栭幍鐐哄寲鍚堢墿鍗婂皫(d菐o)楂�锛岀敱浜庨浕瀛愮Щ鍕�(d貌ng)鐜囩磩鐐虹鐨�5.7鍊嶏紝涓旈珮闋讳娇鐢ㄦ秷鑰楀姛鐜囦綆锛屾晠澶氱敤浜庡埗浣滃姛鐜囨斁澶у櫒绲勪欢銆備竴鑸締(l谩i)瑾�(shu艒)锛岀牱鍖栭幍鍦ㄧ劇(w煤)绶氶�氫俊灏勯牷鍓嶇鐨勬噳(y墨ng)鐢ㄥ叿鏈夐珮宸ヤ綔闋荤巼銆佷綆鍣伈銆佸伐浣滄韩搴﹂仼鐢ㄨ寖鍦嶉珮銆佷互鍙婅兘婧愬埄鐢ㄧ巼浣崇瓑骞剧ó鍎�(y艒u)榛�(di菐n)銆�
銆�銆�鍦ㄧ祫浠剁ó椤炴柟闈�锛屼緷鏅堕珨绠″埗绋嬬祼(ji茅)妲�(g貌u)鍙垎鐐猴細閲戝爆鍗婂皫(d菐o)楂斿牬(ch菐ng)鏁堟噳(y墨ng)鏅堕珨绠�(Metal Semiconductor Field Effect Transistor锛孧ESFET)銆佸亣鏅堕珮闆诲瓙閬风Щ鐜囨櫠楂旂(Pseudomorphic High Electron Mobility Transistor锛宲HEMT)銆佺暟璩�(zh矛)绲�(ji茅)闆欐サ鏅堕珨绠�(Heterostructure Bipolar Transistor锛孒BT)绛変笁椤炪�傚叾涓璈BT闆栫劧鏄笁鑰呬腑闁嬬櫦(f膩)鐨勬妧琛�(sh霉)锛屼絾鍏剁祼(ji茅)妲�(g貌u)涓婄殑鍎�(y艒u)鍕�(sh矛)锛屼娇淇￠亾涓婄殑闆诲瓙娴佸憟鍨傜洿鏂瑰悜锛屽彲浠ョ敘(ch菐n)鐢熻純楂樼殑鍔熺巼瀵嗗害锛屼笖鍍呴渶鍠竴闆诲锛屽湪鍚屾ǎ鐨勮几鍑哄姛鐜囦笅锛孒BT鐨勭窔鎬ф晥鏋滃劒(y艒u)浜庡叾瀹冩櫠楂旂绲�(ji茅)妲�(g貌u)锛屾閬╁悎鐩墠璎涙眰杓曡杽鐭皬銆佸緟姗�(j墨)鏅�(sh铆)闁撻暦(zh菐ng)鐨勭Щ鍕�(d貌ng)闆昏┍銆�
銆�銆�缍滃悎涓婅堪鍚勭ó鎳�(y墨ng)鐢ㄤ簬鐒�(w煤)绶氶�氫俊IC鍒堕�犵殑鍗婂皫(d菐o)楂旀潗鏂欒垏鍒剁▼鎶�琛�(sh霉)锛岀敱浜嶨aAs绛夊埗绋嬫搧鏈夐珮宸ヤ綔闋荤巼銆佷綆鍣伈绛夊劒(y艒u)榛�(di菐n)锛屽洜姝ゅ湪鏈締(l谩i)鍏╀笁骞村収(n猫i)浠嶆槸楂橀�熸ā鎿浕璺�锛岀壒鍒ユ槸鍔熺巼鏀惧ぇ鍣ㄧ殑涓绘祦鍒剁▼鎶�琛�(sh霉)銆備笉閬�(gu貌)GaAs涔熷瓨鍦ㄨ憲鎴愭湰鏄傝泊锛屼笖鐒�(w煤)娉曞拰纭呰姱鐗囬泦鎴愮殑缂洪粸(di菐n)銆�
銆�銆�鑷充簬鍦ㄧ鍒剁▼鏂归潰锛岄毃钁桽iGe鍒剁▼鐨勫礇璧�锛岃垏RF CMOS閫愭鏈濆悜?q奴)宓辨病顖燗娈甸倎閫�(j矛n)锛屽皣褰遍熆Si BiCMOS鍒剁▼鐩墠鍦ㄥ皠闋籌C鐨勪富娴佸湴浣�锛屽挨鍏舵槸SiGe鍒剁▼鎶�琛�(sh霉)灏囨渻(hu矛)鏃ョ泭鍙楀埌閲嶈銆傞亷(gu貌)鍘诲湪鐧�(f膩)灞曞垵鏈�锛孲iGe鐢变簬鎴闋荤巼(Cutoff frequency锛歠T)锛屽強鍏剁浉灏�(du矛)鐨勫穿娼伴浕澹撻亷(gu貌)浣庯紝浣垮緱SiGe闆ｄ互鎳�(y墨ng)鐢ㄥ湪灏勯牷鍔熺巼鏀惧ぇ鍣ㄤ笂锛岀浉杓冧箣涓婫aAs涓嶄絾鍏锋湁楂榝T锛岃�屼笖鍏跺穿娼伴浕澹撲篃閬�(yu菐n)楂樹簬SiGe鎴朣i鍒剁▼锛屽洜姝ゅ湪鍔熺巼鏀惧ぇ鍣�(PA)鐨勬噳(y墨ng)鐢ㄤ笂鏈夋サ澶х殑鍎�(y艒u)鍕�(sh矛)銆備絾缍�(j墨ng)閬�(gu貌)鐭煭骞惧勾鐨勬敼閫�(j矛n)锛岀洰鍓嶇殑SiGe HBT鎶�琛�(sh霉)涓嶅儏宸茶Infineon銆丷F MD銆丆onexant绛夌劇(w煤)绶氶�氫俊IC澶у粻寤ｇ偤鎳�(y墨ng)鐢ㄥ湪鎵嬫(j墨)灏勯牷鍓嶇濡侺NA銆丮ixer绛夌祫浠�锛屼篃宸茬櫦(f膩)鎻叾鍒剁▼闆嗘垚鑳藉姏瀹屾垚闆嗘垚RF/IF鍔熻兘鐨凾ransceiver鐢�(ch菐n)鍝侊紝鏇撮��(j矛n)涓�姝ユ寫鎴�(zh脿n)GaAs鍦≒A鐢�(ch菐n)鍝佺殑鍎�(y艒u)鍕�(sh矛)銆�
銆�銆�闄や簡涓婅堪鐨勫埗绋嬪锛屽叾瀹冮�愭鎳�(y墨ng)鐢ㄥ湪鐒�(w煤)绶氶�氫俊楂橀牷绲勪欢鐨勫熀鏉愰倓鏈夌７鍖栭姦(InP)鎴朑aAs on Si绛夊埗绋�銆傚墠鑰呰純鐮峰寲閹垫洿閬╀簬楂橀牷鎳�(y墨ng)鐢�锛屾晥鐜囨洿楂�锛岀祫浠舵洿灏�锛岃瑾�(r猫n)鐐烘湭渚�(l谩i)鏈夊彲鑳芥渻(hu矛)鍙栦唬鐮峰寲閹碉紝鍙槸鐩墠鍍�(ji脿)鏍兼槀璨�锛涘悗鑰呬富瑕佺敱Motorola鐧�(f膩)灞曪紝浜�2001骞�9鏈堝甯冩垚鍔熺敤浜庡晢妤�(y猫)鐢ㄩ��锛屽彲灏嘒aAs鐨勫姛鐜囨斁澶у櫒(PA)鑸嘢i鐐轰富鐨勫熀闋绘ā濉婄祼(ji茅)鍚堝湪涓�璧蜂互闄嶄綆鎴愭湰锛屼緷鎿�(j霉)Motorola鐨勬(g貌u)鎯�锛岀牱鍖栭幍鑸囩绲�(ji茅)鍚堝(sh铆)鐢ㄥ寲鍚�锛屾渶鍒濆皣鍏堥亱(y霉n)鐢ㄥ湪杓稿嚭鍔熺巼灏忎簬10W鐨刉LAN鍜屾墜姗�(j墨)绛夋秷璨�(f猫i)椤炵敘(ch菐n)鍝佷笂銆備笉閬�(gu貌)鐮峰寲閹佃垏纭呯祼(ji茅)鍚�锛岄渶瑕侀澶栫殑鍔犲伐宸ョ▼锛屽埗绋嬬▼搴忓鍔�锛岃壇鐜囨渻(hu矛)闄嶄綆锛屽洜姝ゅ叾鎴愭湰鑸囧晢妤�(y猫)鍖栭��(j矛n)绋嬬瓑鍟�(w猫n)椤屼粛鏈夊緟鑰冮(y脿n)銆�
