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鎮ㄥソ锛屾杩庝締鍒扮董搴浕瀛愬競鍫寸恫(w菐ng) 鐧婚寗 | 鍏嶈不娉ㄥ唺

闆穿鍏夐浕鎺㈡脯鍣�
闁辫畝锛�8684鏅傞枔锛�2011-04-21 17:42:55

銆�銆�鍏夐浕鎺㈡脯鍣ㄦ槸灏囧厜淇¤櫉杞�(zhu菐n)璁�?y艒u)娈″é鐩樻煏閽犻?锛岄洩宕╁厜闆绘帰娓櫒閲囩敤鐨勫嵆鏄洩宕�鍏夐浕浜屾サ绠�(APD)锛岃兘澶犲叿鏈夋洿澶х殑闊挎噳(y墨ng)搴�銆侫PD灏囦富瑕佹噳(y墨ng)鐢ㄤ簬闀疯窛闆㈡垨鎺ユ敹鍏夊姛鐜囧彈鍒板叾瀹冮檺鍒惰�岃純灏忕殑鍏夌簴閫氫俊绯荤当(t菕ng)銆傜洰鍓嶅緢澶氬厜鍣ㄤ欢灏堝灏岮PD鐨勫墠鏅崄鍒嗙湅濂�锛岃獚鐐篈PD鐨勭爺绌跺皪浜庡寮风浉闂�(gu膩n)闋�(l菒ng)鍩熺殑鍦嬮殯绔剁埈鍔�锛屾槸鍗佸垎蹇呰鐨勩��

鏉愭枡

銆�銆�1)Si

銆�銆�Si鏉愭枡鎶�琛�(sh霉)鏄竴绋垚鐔熸妧琛�(sh霉)锛屽唬娉涙噳(y墨ng)鐢ㄤ簬寰浕瀛愰牁(l菒ng)鍩�锛屼絾骞朵笉閬╁悎鍒跺倷鐩墠鍏夐�氫俊闋�(l菒ng)鍩熸櫘閬嶆帴鍙楃殑1.31mm,1.55mm娉㈤暦鑼冨湇鐨勫櫒浠躲��

銆�銆�2)Ge

銆�銆�Ge APD闆栫劧鍏夎瓬闊挎噳(y墨ng)閬╁悎鍏夌簴鍌宠几?sh霉)铔絧鑰�銆佷綆鑹叉暎鐨勮姹�锛屼絾鍦ㄥ埗鍌欏伐钘濅腑瀛樺湪寰堝ぇ鐨勫洶闆�銆傝�屼笖锛孏e鐨勯浕瀛愬拰绌虹┐鐨勯洟鍖栫巼姣旂巼锛� 锛夋帴杩�1锛屽洜姝ゅ緢闆ｅ埗鍌欏嚭楂樻�ц兘鐨凙PD鍣ㄤ欢銆�

銆�銆�3)In0.53Ga0.47As/InP

銆�銆�閬告搰In0.53Ga0.47As浣滅偤APD鐨勫厜鍚告敹灞�锛孖nP浣滅偤鍊嶅灞�锛屾槸涓�绋瘮杓冩湁鏁堢殑鏂规硶[2]銆侷n0.53Ga0.47As鏉愭枡鐨勫惛鏀跺嘲鍊煎湪1.65mm, 鍦�1.31mm,1.55mm 娉㈤暦鏈夌磩鐐�104cm-1楂樺惛鏀剁郴鏁�(sh霉)锛屾槸鐩墠鍏夋帰娓櫒鍚告敹灞ゆ潗鏂欍�侷n0.53Ga0.47As鍏夐浕浜屾サ绠℃瘮璧稧e鍏夐浕浜屾サ绠�锛屾湁濡備笅鍎�(y艒u)榛烇細锛�1锛塈n0.53Ga0.47As鏄洿鎺ュ付闅欏崐灏�(d菐o)楂�锛屽惛鏀剁郴鏁�(sh霉)楂橈紱锛�2锛塈n0.53Ga0.47As浠嬮浕甯告暩(sh霉)姣擥e灏�锛岃寰楀埌鑸嘒e鍏夐浕浜屾サ绠＄浉鍚岀殑閲忓瓙鏁堢巼鍜岄浕瀹�锛屽彲浠ユ笡灏慖n0.53Ga0.47As鑰楃洝灞ょ殑鍘氬害锛屽洜姝ゅ彲浠ラ爯(y霉)鏈烮n0.53Ga0.47As/InP鍏変簩妤电鍏锋湁楂樼殑鏁堟噳(y墨ng)鍜岄熆鎳�(y墨ng)锛涳紙3锛夐浕瀛愬拰绌虹┐鐨勯洟鍖栫巼姣旂巼锛� 锛変笉鏄�1锛屼篃灏辨槸瑾狪n0.53Ga0.47As/InP APD鍣伈杓冧綆锛涳紙4锛塈n0.53Ga0.47As鑸嘔nP鏅舵牸瀹屽叏鍖归厤锛岀敤MOCVD鏂规硶鍦↖nP瑗簳涓婂彲浠ョ敓闀峰嚭楂樿唱(zh矛)閲忕殑In0.53Ga0.47As澶栧欢灞わ紝鍙互椤憲鐨勯檷浣庨�氶亷p-n绲�(ji茅)鐨勬殫闆绘祦銆傦紙5锛塈n0.53Ga0.47As/InP鐣拌唱(zh矛)绲�(ji茅)妲�(g貌u)澶栧欢鎶�琛�(sh霉)锛屽緢瀹规槗鍦ㄥ惛鏀跺崁(q奴)鐢熼暦杓冮珮甯堕殭鐨勭獥鍙ｅ堡锛岀敱姝ゅ彲浠ユ秷闄よ〃闈㈠京(f霉)鍚堝皪閲忓瓙鏁堢巼鐨勫奖闊�銆�

銆�銆�4)InGaAsP/InP

銆�銆�閬告搰InGaAsP浣滅偤鍏夊惛鏀跺堡锛孖nP浣滅偤鍊嶅灞�,鍙互鍒跺倷闊挎噳(y墨ng)娉㈤暦鍦�1-1.4mm锛岄珮閲忓瓙鏁堢巼锛屼綆鏆楅浕娴�锛岄珮闆穿澧炵泭寰楃殑APD銆傞�氶亷閬告搰涓嶅悓鐨勫悎閲戠祫鍒嗭紝婊胯冻灏嶇壒瀹氭尝闀风殑鎬ц兘銆�

銆�銆�)InGaAs/InAlAs

銆�銆�In0.52Al0.48As鏉愭枡甯堕殭瀵紙1.47 eV锛�锛屽湪1.55 mm 娉㈤暦鑼冨湇涓嶅惛鏀讹紝鏈夎瓑鎿�(j霉)椤ず锛岃杽In0.52Al0.48As澶栧欢灞ゅ湪绱旈浕瀛愭敞鍏ョ殑姊濅欢涓�锛屼綔鐐哄�嶅灞ゆ潗鏂�锛屽彲浠ョ嵅寰楁瘮InP鏇村ソ鐨勫鐩婄壒鎬с��

銆�銆�6)InGaAs/InGaAs锛圥锛�/InAlAs鍜孖nGaAs/In锛圓l锛塆aAs/InAlAs

銆�銆�鏉愭枡鐨勭鎾為洟鍖栫巼鏄奖闊緼PD鎬ц兘鐨勯噸瑕佸洜绱�銆傜爺绌惰〃鏄嶽6]锛屽彲浠ラ�氶亷寮曞叆InGaAs锛圥锛�/InAlAs鍜� In锛圓l锛塆aAs/InAlAs瓒呮櫠鏍肩祼(ji茅)妲�(g貌u)鎻愰珮鍊嶅灞ょ殑纰版挒闆㈠寲鐜囥�傛噳(y墨ng)鐢ㄨ秴鏅舵牸绲�(ji茅)妲�(g貌u)閫欎竴鑳藉付宸ョ▼鍙互浜虹偤鎺у埗灏�(d菐o)甯跺拰鍍瑰付鍊奸枔鐨勯潪灏嶇ū鎬у付閭婁笉閫ｇ簩(x霉)鎬�锛屽苟淇濊瓑灏�(d菐o)甯朵笉閫ｇ簩(x霉)鎬ч仩閬犲ぇ浜庡児甯朵笉閫ｇ簩(x霉)鎬э紙螖Ec>>螖Ev锛�銆傝垏InGaAs楂旀潗鏂欑浉姣�锛孖nGaAs/InAlAs閲忓瓙闃遍浕瀛愰洟鍖栫巼(a)鏄庨’澧炲姞锛岄浕瀛愬拰绌虹┐鐛插緱浜嗛澶栬兘閲�锛岀敱浜幬擡c>>螖Ev锛屽彲浠ラ爯(y霉)鏈熼浕瀛愭墍鐛插緱鐨勮兘閲忎娇闆诲瓙闆㈠寲鐜囩殑澧炲姞閲忛仩閬犲ぇ浜庣┖绌磋兘閲忓皪绌虹┐闆㈠寲鐜�(b)鐨勮并鐛�锛岄浕瀛愰洟鍖栫巼鑸囩┖绌撮洟鍖栫巼鐨勬瘮鐜囷紙k锛夊鍔�銆傚洜姝�锛屾噳(y墨ng)鐢ㄨ秴鏅舵牸绲�(ji茅)妲�(g貌u)鍙互鐛插緱澶х殑澧炵泭-甯跺绌嶏紙GBW锛夊拰浣庡櫔鑱叉�ц兘銆傜劧鑰岋紝閫欑ó鍙互浣縦鍊煎鍔犵殑InGaAs/InAlAs閲忓瓙闃辩祼(ji茅)妲�(g貌u)APD寰堥洠鎳�(y墨ng)鐢ㄥ湪鍏夋帴鏀舵涓�銆傞�欐槸鍥犵偤褰遍熆闊挎噳(y墨ng)搴︾殑鍊嶅鍥犲瓙鍙楅檺浜庢殫闆绘祦锛岃�屼笉鏄�嶅鍣伈銆傚湪姝ょ祼(ji茅)妲�(g貌u)涓紝鏆楅浕娴佷富瑕佹槸鐢辩獎甯堕殭鐨処nGaAs闃卞堡鐨勯毀閬撴晥鎳�(y墨ng)寮曡捣锛屽洜姝わ紝寮曞叆瀵付闅欑殑鍥涘厓鍚堥噾锛屾瘮濡侷nGaAsP鎴朓nAlGaAs,浠ｆ浛InGaAs浣滅偤閲忓瓙闃辩祼(ji茅)妲�(g貌u)鐨勯槺灞ゅ彲浠ユ姂鍒舵殫闆绘祦銆�

銆�銆�鍦ㄧ浉鍚岀殑闆诲牬涓嬶紝瓒呮櫠鏍肩祼(ji茅)妲�(g貌u)鍙互澶уぇ鎻愰珮k,琛ㄦ槑瓒呮櫠鏍肩祼(ji茅)妲�(g貌u) 鐨勫櫒浠跺叿鏈夋洿澶х殑淇″櫔姣�銆傜爺绌惰〃鏄庯紝InAlGaAs/InAlAs閲忓瓙闃辩祼(ji茅)妲�(g貌u)鐨勫钩鍧囪兘闅欑偤1.32 eV, InAlGaAs鍜孖nAlAs鐨勫付闅欏�煎垎鍒ョ偤1.13 eV鍜�1.47 eV,閲忓瓙闃辩祼(ji茅)妲�(g貌u)鐨勮兘闅欏�间粙浜嶪nAlGaAs鍜孖nAlAs鐨勫付闅欏�间箣闁�銆傞噺瀛愰槺绲�(ji茅)妲�(g貌u)鐨勭┖绌撮洟鍖栫巼杩戜技绛変簬InAlGaAs鍜孖nAlAs绌虹┐闆㈠寲鐜囩殑骞冲潎鍊硷紝鍥犳InAlGaAs/InAlAs绲�(ji茅)妲�(g貌u)鐨勭┖绌撮洟鍖栫巼鍙互鐢ㄥ付闅欏樊渚嗗緢濂界殑瑙ｉ噵銆傜劧鑰屽皪浜庨浕瀛愰洟鍖栫巼渚嗚锛岄噺瀛愰槺绲�(ji茅)妲�(g貌u)姣擨nAlGaAs鍜孖nAlAs鐨勫�奸兘澶�銆傞�欑ó宸暟琛ㄦ槑闆诲瓙纰版挒闆㈠寲鐜囩殑澧炲姞鏄敱浜庡ぇ鐨勫皫(d菐o)甯跺樊锛埼擡c锛夊紩璧风殑銆傚湪InGaAsP/InAlAs 鐣拌唱(zh矛)绲�(ji茅)涓紝閫欑ó澶х殑灏�(d菐o)甯跺樊鏇寸偤鏄庨’锛岃�屽児甯剁殑宸暟閫氶亷P鐨勫紩鍏ュ咕涔庢秷澶�锛岄爯(y霉)鏈烮nGaAsP/InAlAs APD鍏锋湁鏇村ぇ鐨勯浕瀛愮鎾為洟鍖栫巼銆�

鑺墖绲�(ji茅)妲�(g貌u)

銆�銆�鍚堢悊鐨勮姱鐗囩祼(ji茅)妲�(g貌u)鏄珮鎬ц兘鍣ㄤ欢鐨勫熀鏈繚璀夈�侫PD绲�(ji茅)妲�(g貌u)瑷�(sh猫)瑷堜富瑕佽�冩叜RC鏅傞枔甯告暩(sh霉),鍦ㄧ暟璩�(zh矛)绲�(ji茅)鐣岄潰鐨勭┖绌翠繕鐛�,杓夋祦瀛愰�氶亷鑰楃洝鍗�(q奴)鐨勬浮瓒婃檪闁撶瓑鍥犵礌銆備笅闈㈠皪鍏剁祼(ji茅)妲�(g貌u)鐨勭櫦(f膩)灞曚綔涓�缍滆堪锛�

銆�銆�1锛夊熀鏈祼(ji茅)妲�(g貌u)

銆�銆�鏈�绨″柈鐨凙PD绲�(ji茅)妲�(g貌u)鏄湪PIN鍏夐浕浜屾サ绠＄殑鍩虹(ch菙)涓�锛屽皪P鍗�(q奴)鍜孨鍗�(q奴)閮介�茶浜嗛噸鎽婚洔锛屽湪閯拌繎P鍗�(q奴)鎴朜鍗�(q奴)寮曢�瞡鍨嬫垨p鍨嬪�嶆啂鍗�(q奴)锛屼互鐢�(ch菐n)鐢熶簩娆￠浕瀛愬拰绌虹┐灏嶏紝寰炶�屽鐝�(xi脿n)灏嶄竴娆″厜闆绘祦鐨勬斁澶т綔鐢�銆傚皪浜嶪nP 绯诲垪鏉愭枡渚嗚锛岀敱浜庣┖绌寸鎾為浕闆㈢郴鏁�(sh霉)澶т簬闆诲瓙纰版挒闆婚洟绯绘暩(sh霉)锛岄�氬父灏嘚鍨嬫懟闆滅殑澧炵泭鍗�(q奴)缃簬P鍗�(q奴)鐨勪綅缃�銆傚湪鐞嗘兂鎯呮硜涓�锛屽彧鏈夌┖绌存敞鍏ュ埌澧炵泭鍗�(q奴)锛屾墍浠ョū閫欑ó绲�(ji茅)妲�(g貌u)鐐虹┖绌存敞鍏ュ瀷绲�(ji茅)妲�(g貌u)銆�

銆�銆�2锛夊惛鏀跺拰澧炵泭鍗�(q奴)鍒嗛枊

銆�銆�鐢变簬InP瀵付闅欑壒鎬э紙InP鐐�1.35eV, InGaAs鐐�0.75eV锛�锛岄�氬父浠nP鐐哄鐩婂崁(q奴)鏉愭枡锛孖nGaAs鐐哄惛鏀跺崁(q奴)鏉愭枡銆�

銆�銆�3锛夊垎鍒ュ惛鏀�銆佹几璁娿�佸鐩婏紙SAGM锛夌祼(ji茅)妲�(g貌u)鐨勬彁鍑�

銆�銆�鐩墠鍟嗗搧鍖栫殑APD鍣ㄤ欢澶ч兘閲囩敤InP/InGaAs鏉愭枡锛孖nGaAs浣滅偤鍚告敹灞�锛孖nP鍦ㄨ純楂橀浕鍫翠笅(>5x105V/cm)涓嬭�屼笉琚搳绌�锛屽彲浠ヤ綔鐐哄鐩婂崁(q奴)鏉愭枡銆傚皪浜庤┎鏉愭枡锛� 鎵�浠ラ�欑óAPD鐨勮ō(sh猫)瑷堟槸闆穿閬庣▼鐢辩┖绌寸鎾炶�屽湪n鍨婭nP涓舰鎴�銆傝�冩叜鍒癐nP鍜孖nGaAs鐨勫付闅欏樊鍒ヨ純澶�,鍍瑰付涓婂ぇ绱�0.4eV鐨勮兘绱氬樊浣垮緱鍦↖nGaAs鍚告敹灞や腑鐢�(ch菐n)鐢熺殑绌虹┐锛屽湪閬斿埌InP鍊嶅灞や箣鍓嶅湪鐣拌唱(zh矛)绲�(ji茅)閭婄罚鍙楀埌闃荤鑰岄�熷害澶уぇ娓涘皯锛屽緸鑰岄�欑ó APD鐨勯熆鎳�(y墨ng)鏅傞枔闀凤紝甯跺寰堢獎銆傞�欏�嬪晱椤屽彲浠ュ湪鍏╃ó鏉愭枡涔嬮枔鍔營nGaAsP閬庢浮灞よ�屽緱鍒拌В姹恒��

銆�銆�4锛夊垎鍒ュ惛鏀�銆佹几璁娿�侀浕鑽峰拰澧炵泭锛圫AGCM锛夌祼(ji茅)妲�(g貌u)鐨勬彁鍑�

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銆�銆�5锛夎鎸厰澧炲挤鍨� (RCE) SAGCM绲�(ji茅)妲�(g貌u)

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銆�銆�鐢变簬GaAs/AlAs璜ф尟鑵斿伐钘濈殑鎴愮啛锛岀洰鍓嶉�欑ó绲�(ji茅)妲�(g貌u)鐨勫櫒浠朵互GaAs/AlGaAs鏉愭枡鐐烘渶澶�锛屽鐩�-甯跺绌�300GHz浠ヤ笂銆侷nP/InGaAs璜ф尟鑵旂敱浜嶪nP鍜孖nGaAs鍏╃ó鏉愭枡鎶樺皠鐜囧樊杓冨皬锛屼娇寰楀伐钘濊畩寰楀京(f霉)闆�锛屽洜姝や互InP鐐哄熀鏉愭枡鐨勮鎸厰澧炲挤鍨嬫帰娓櫒瀵︾敤鍖栫殑寰堝皯銆傜暥(d膩ng)鐒跺彲浠ュ埄鐢ㄩ嵉鍚堟妧琛�(sh霉)锛屾噳(y墨ng)鐢℅aAs/AlAs鐨勬垚鐔熷伐钘�锛屽埗鍌欎互InP鐐哄熀鏉愭枡鐨勮鎸厰澧炲挤鍨嬫帰娓櫒銆傝繎骞翠締鍙堝嚭鐝�(xi脿n)浜嗕互InAlGaAs/InAlAs鎴栬�匢nGaAs(P)/InAlAs鏉愭枡鐨凞BR,鍏舵尝闀蜂綅浜庢垜鍊戞劅鑸堣叮鐨勬尝闀疯寖鍦�锛屽彈鍒扮爺绌跺拰闁嬬櫦(f膩)浜哄摗鐨勫唬娉涢棞(gu膩n)娉�銆傜敤MBE(鍒嗗瓙鏉熷寤�)鐢熼暦鐨勫櫒浠剁祼(ji茅)妲�(g貌u)鍖呮嫭鍗婄禃绶ｇ殑InP瑗簳锛孌BR鍙嶅皠閺★紙30灏嶅悇灞ゅ帤搴︾偤位/4鐨処nGaAs/InAlAs锛夛紝鏈懟闆滅殑InAlAs鍊嶅灞わ紝P鍨嬫懟闆滅殑InAlAs闆昏嵎灞�锛岄浕鑽峰堡鐨勪綔鐢ㄦ槸纰轰繚60 nm鍘氱殑InAlAs鍚告敹灞ょ殑闆诲牬涓嶉珮浜�105 V/cm,淇濊瓑鍣ㄤ欢楂橀�熺巼鐗规�с�傜敓闀风殑鏄湭鎽婚洔鐨処nAlAs绌洪枔灞ゅ拰P+-InAlAs闋傚堡锛屽叾鍘氬害閮介�茶浜嗗劒(y艒u)鍖栬ō(sh猫)瑷堜互纰轰繚鍣ㄤ欢鍦ㄧ壒瀹氭尝闀烽兘鍏锋湁鐨勯熆鎳�(y墨ng)搴�銆�

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銆�銆�6锛夐倞鑰﹀悎鐨勬尝灏�(d菐o)绲�(ji茅)妲�(g貌u) (WG-APD)

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銆�銆�鍦�5绲﹀嚭浜咺nGaAs/InAlAs SACM WG-APD绲�(ji茅)妲�(g貌u)绀烘剰鍦朳12]銆傝┎鍣ㄤ欢鏄敤MOCVD鏂规硶锛屽湪S-鎽婚洔鐨勶紙100锛塈nP瑗簳涓�锛岀敓闀�100 nm N鍨婭nP閬庢浮灞�锛屽啀鐢熼暦涓�灞-鍨婭nAlAs灞�銆�150nm鐨勫�嶅灞ゆ槸閲囩敤闈炴晠鎰忔懟闆滅殑InAlAs鏉愭枡銆俍n鎽婚洔婵冨害鐐�2.1脳1017 cm-3 鐨�180 nm闆昏嵎灞ょ殑浣滅敤鏄(di脿o)鏁撮浕鍫村湪鍚告敹灞ゅ拰鍊嶅灞ょ殑鍒嗛厤锛屽惛鏀跺堡涓婁笅鍏╁伌(c猫)鍚勭敓闀�100 nm闈炴晠鎰忔懟闆滅殑InAlGaAs娉㈠皫(d菐o)灞�銆傞�欑ó绲�(ji茅)妲�(g貌u)鐨勫櫒浠跺彲浠ュ鐝�(xi脿n)320 GHz鐨勫鐩�-甯跺绌嶅拰妤典綆鐨勫櫔鑱茬壒鎬э紙k=0.15锛�,鍏呭垎琛ㄧ従(xi脿n)浜嗗叾鍦ㄩ珮閫熺巼鍜岄暦璺濋洟鍏夐�氫俊闋�(l菒ng)鍩熺殑娼涘湪鎳�(y墨ng)鐢�銆�

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绲�(ji茅)妲�(g貌u)鍜岃兘甯�

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