銆�銆�1.澶櫧(y谩ng)鑳介浕姹�
銆�銆�鐐哄厠鏈岹AsS鐣拌唱(zh矛)绲�(ji茅)鏉愭枡鐨勬櫠鏍煎け閰嶅ぇ(4)a/i鍙婄啽鑶ㄨ劰绯绘暩(sh霉)涓嶅尮閰嶅晱(w猫n)椤�,棣栧厛閲囩敤Ge绶╂矕灞�,鍒舵垚Ga/e锟ョ祼(ji茅)妲�(g貌u)",鍦ㄧ涓婄敓闀�(zh菐ng)Ge浣淎sG/i鍠櫠鐨勭爺绌惰純澶�,鏈夌敤闆诲瓙鏌捀鐧�(f膩)娉曟垨MB娉�,缈﹁�呭彲鎺ф�у樊,宸ヨ棟寰�(f霉)闆�,鍚庤�呭湪鍚屼竴绯荤当(t菕ng)涓敓闀�(zh菐ng),鎻愰珮浜嗗彲鎺ф��,浣縂AsEa灞ゆ�ц兘鏀瑰杽.浣嗙敱浜嶨鍚慓a鐢熼暦(zh菐ng)灞ゆ摯(ku貌)鏁ｇ郴鏁�(sh霉)澶�,浣垮悗渚�(l谩i)鐢熼暦(zh菐ng)鐨凣AsbeAsa~寤跺堡琚獹e娌炬薄,鍥犳闆栫劧鍙敤GAsGeS鏉愭枡鍒舵垚浜嗗お闄�(y谩ng)鑳介浕姹�,鏁堢巼12%,鎬ц兘涓嶄匠.
銆�銆�2.鐧�(f膩)鍏夌
銆�銆�RobertM.绛変汉閲囩敤VEP鎶�琛�(sh霉)鍦ㄧ瑗簳涓婄敓闀�(zh菐ng)Ge鑶�,鍐嶇敤MOVD鎶�琛�(sh霉)鍦⊿i/Ge鐬充笂鐢熼暦(zh菐ng)澶氬堡Ga灞�,鍒舵垚鐣拌唱(zh矛)绲�(ji茅)鏉愭枡Zn鎿�(ku貌)鏁ｅ悗鍒嗗垾钂哥櫦(f膩)PtAuAuNi,浣淧闈㈠拰n闆绘サ绉堟垚鐧�(f膩)鍏夌,鍏舵�ц兘鐐�:鐧�(f膩)灏勬尝闀�(zh菐ng)82m,鈻�=3u.鏃ユ湰OKI闆诲瓙鍏潰7n5rn鍙搁噰鐢ㄤ綆澹揗OC鎶�琛�(sh霉),鍦ㄧ瑗簳涓婄嵅寰楃祼(ji茅)鏅舵�ц兘鑹ソ鐨凣AsGaAsVDa/A1澶栧欢灞�,鍒舵垚鍙(ji脿n)鍏夌櫦(f膩)鍏夌,鍏舵鍚慖V鎬ф洸绶氬緢寰�,鍙嶅悜?y脿n)姗涚煉鑸�?琛ㄦ槑GaAs鈥旂壒AI鐐虹獊璁婄祼(ji茅),鍏跺厜璀滄尝闀�(zh菐ng)=70m,A~5m,鍦�100n4n0mA涓嬭几鍑哄姛鐜�06.mw,澶栭噺瀛愭晥鐜�03%.
銆�銆�涓闄笂娴峰喍閲戠爺绌舵墍鐢ㄧ瑗簳,閲囩敤MBE鎶�琛�(sh霉)澶氭鐢熼暦(zh菐ng)娉曞埗浣滃鍛ㄦ湡AI/AsAsGa鎳�(y墨ng)璁婅秴鏅舵牸浣滅珐娌栧堡,鎽籗鐨刵Ga澶栧欢灞ゅ拰鎽籅e鈥擥a澶栧欢灞�,i鈥擜s鐨凱As浠ュ強P涓�G8鎺ヨЦAs灞�,鍦≒闈㈣捀AuZ鍜宯鈥攏闈㈣捀AuNiGe鍒舵垚鐧�(f膩)鍏夌,鍏禝V鎬ф甯�,鍏夎几鍑哄姛鐜�0.3mw
銆�銆�SsmuKod绛変汉鍦ㄧ瑗簳涓婇噰鐢∕O-clrduuno-hoieVPE鎶�琛�(sh霉)鐢熼暦(zh菐ng)IGanP灞ゅ拰MOVPE鎶�琛�(sh霉)鐢熼暦(zh菐ng)Ga灞�,鍒舵垚IGa鐧�(f膩)鍏夌,鍏剁櫦(f膩)灏勫厜璀�60m,鍦�5AsnP6aKA/m.鍏ラ浕娴乧娉ㄥ瘑搴︿笅宸ヤ綔1t鐗规�ф湭鍔ｅ寲,瀹冨皣鍙兘鍙栦唬HeNe鍏夊櫒鑰屾摯(ku貌)澶у叾鎳�(y墨ng)鐢ㄨ寖鍦�.0b鏅�(sh铆)锝炴縺Raeh绛変汉閲囩敤纭呰ク搴�,鐢ㄤ綆澹揗OCVD娉曠敓闀�(zh菐ng)榧犵暟璩�(zh矛)绲�(ji茅)鏉愭枡lGa/lAszgl鍒┾憼AsGan瓒呮櫠鏍肩劇(w煤)鎽婚洔绶╂矕灞�,鈶n闄愬埗灞�,鈶Gas鏈夋簮灞�,鈶IP闄愬埗灞�,鐢ㄨ唱(zh矛)瀛愭敞鈥擨PnAP鈥攏鍏ヤ綔绲曠罚灞�,鍒舵垚鐧�(f膩)灏勫厜璀滃叆118A~0v娉ㄥ叆闆绘祦20.5m,5me鍦�0mA涓�,閫ｇ簩(x霉)宸ヤ綔24灏忔檪(sh铆)鏈嚭鐝�(xi脿n)琛伴��.
銆�銆�3.婵�鍏夊櫒
銆�銆�JZ.hr绛変汉鐢∕BE娉曞湪纭呰ク搴曚笂鐢熼暦(zh菐ng)Ga/A1鐣拌唱(zh矛)绲�(ji茅)鏉愭枡,鍒舵垚鍠噺瀛愰槺婵�鍏夊櫒AsGaAs(SQw),鍏惰剤娌栧伐浣滈柧鍊奸浕娴�4mA,鍦�120.I涓嬭(di脿o)鍒堕牔鐜�2.GHz5.HalI绛変汉鍦ㄧ瑗簳涓婄敤l_MBE娉曠敓闀�(zh菐ng)GaAsGa鐣拌唱(zh矛)绲�(ji茅)妲�(g貌u)鏉愭枡,鍒舵垚AI]As婵�鍏夊櫒,闁惧�奸浕娴�100mA,瀹ゆ韩閫ｇ簩(x霉)宸ヤ綔1灏忔檪(sh铆),0T.3鈩�,骞舵寚鏄庨噰鐢ㄧ瑗簳浣垮皫(d菐o)鐔辨�ф敼鍠�(灏�38鑷充竴鍦坙鍦ㄧ瑗綆3).Duus"绛変汉鍦ㄧ瑗簳涓婄敤MOCVD娉曠洿鎺ョ敓闀�(zh菐ng)Ga/Al8pi"AsGaAs鏉愭枡,鍒舵垚浣庨棡鍊�,楂樻晥鐜囬洐鐣拌唱(zh矛)绲�(ji茅)娉ㄥ叆婵�鍏夊櫒,鍏禝-.KA/m.t=35c,閲忓瓙鏁堢巼7%,宸冲婧�ｇ簩(x霉)宸�0浣�.m绛変汉鐢∕BE鍜孧OCVD娉曞湪纭呰ク搴曚笂鐢熼暦(zh菐ng)GaAsGa/i瀛愰槺鐣拌唱(zh矛)绲�(ji茅)鏉愭枡,NaAI]Ass閲忓埗鎴愰噺瀛愰槺婵�鍏夊櫒,鍦ㄥ婧�ｇ簩(x霉)宸ヤ綔,闁戝�奸浕娴佸瘑搴�280A]r,.脳1.e缍�(j墨ng)闀�(zh菐ng)鏅�(sh铆)闁撳伐浣滄�ц兘绌�(w臎n)瀹�.a,leHonKia-om绛変汉鍦ㄧ瑗簳涓婇噰鐢∕EMB鍜孧OC鎶�琛�(sh霉)鐢熼暦(zh菐ng)GAi/a闆橢VDaAsGAs鐣拌唱(zh矛)绲�(ji茅)鏉愭枡,鍒舵垚姊濆舰澶у姛鐜囨縺鍏夊櫒,鍏跺嘲鍊煎姛鐜囧凡閬�(d谩)14w(闈�)8r姣弌,瀹ゆ韩鑴堟矕闁煎煷闆绘祦105mA,閲忓瓙鏁堢巼3%.0M.aeh绛変汉鍦ㄧ瑗簳涓婂凡鍒舵垚GanPIPX鐣拌唱(zh矛)绲�(ji茅)婵�鍏夊櫒,鍏剁櫦(f膩)灏勬尝闀�(zh菐ng)RggilAs/n~12p.7.m,I'0.鐐�1KA/m.c瀹ゆ韩涓嬮噺瀛愭晥鐜�1%,杓稿嚭鍔熺巼2rw.鎷勫湅(gu贸)Tooo0ohmsn鍏徃鐢∕OC鎶�琛�(sh霉),鍦ㄧ瑗簳涓婄敓闀�(zh菐ng)IGaPIPVDnAs/n鐣拌唱(zh矛)绲�(ji茅)鏉愭枡,甯舵垚姘у寲鐗╂褰㈡縺鍏夊櫒,=412D,鎮跺�奸浕娴佸瘑搴�1KA/m..7in0c,鍔熺巼1rw.
銆�銆�4.鍏跺畠鍣ㄤ欢
銆�銆�鍒╃敤GaAs/Si鐨勪竴楂斿寲鏅堕珨,閭勫彲闁�(k膩i)灞曞绋柊绌庣殑鍏夊櫒浠�,鍏朵腑G8/i8/iAssOEC涓塈.缍櫒浠�,浣滅偤鏁�(sh霉)瀛楄▓(j矛)绠楁(j墨)鐨勪笁缍汉閫犵恫(w菐ng)鑶滅瓑.SSki,aa绛変汉鐢℅AsS鏉愭枡闁�(k膩i)鐧�(f膩)鍑哄叿鏈塆Asa鐧�(f膩)鍏�,iS鍙楀厜鐨勬柊绌庡櫒浠�,瀹冩槸鍦≒S涓婄敓闀�(zh菐ng)鐣歌畩瓒呮櫠鏍间綔绶╂矕鎵�鈥攊灞�,鍐嶇敓闀�(zh菐ng)闆欑暟璩�(zh矛)绲�(ji茅)婵�鍏夊櫒,P鍨嬬琛ㄩ潰鍙嶅瀷灞S,浠ュ厜浣滆�﹀悎浜掗�ｇ窔銆�
