銆�銆�1 瓒呯簿瀵嗘脯(c猫)閲�
銆�銆�闅ㄨ憲绉戝(xu茅)鎶�琛�(sh霉)鐨勮繀閫熺櫦(f膩)灞� ,灏�(du矛)鍎�鍣ㄧ簿搴︾殑瑕佹眰鍑虹従(xi脿n)浜嗘暩(sh霉)閲忕礆(j铆)鐨勮畩鍖�銆傚緸绮惧瘑娓�(c猫)閲� (0. 5锝�0.005渭m) ,鐧�(f膩)灞曞埌瓒呯簿瀵嗘脯(c猫)閲�(0.05锝�0.005 nm) ,鏈�杩戝張鎻愬嚭绱嶇背绮惧害娓�(c猫)閲�(5锝�0. 05nm)鐨勮姹�銆傚湪涓�瀹氳寖鍦嶅収(n猫i) ,PZT 浼搁暦(zh菐ng)閲忓拰鏂藉姞鐨勯浕澹撹繎浼兼垚绶氬舰闂�(gu膩n)绯� ,鏁呮鍒╃敤鍏剁簿搴﹂珮鐨勭壒榛�(di菐n) ,鍙湪瓒呯簿瀵嗘脯(c猫)閲忎腑寰椾互鎳�(y墨ng)鐢ㄣ��
銆�銆�渚嬪 ,1982 骞� ,IBM 铇囬粠涓栫爺绌舵墍绛夋垚鍔熷湴鐮斿埗鍑轰笘鐣屼笂鑷�(t谩i)鏂板瀷鐨勮〃闈㈠垎鏋愬剙鍣� ,鍗虫巸鎻忛毀閬撻’寰彙(scanning Tunneling Microscope ,STM) ,鍏舵巸鎻忛牠渚跨敱涓夊��(g猫)鐩镐簰鍨傜洿鐨勫闆婚櫠鐡风祫鎴� ,鍙敤浜庝笁缍巸鎻�銆係TM 鍏锋湁妤甸珮鐨勭┖闁撳垎杈ㄨ兘鍔�(骞宠鏂瑰悜鐨勫垎杈ㄧ巼鐐� 0. 04nm ,鍨傜洿鏂瑰悜鐨勫垎杈ㄧ巼閬�(d谩)鍒� 0.01 nm) 銆�
銆�銆�2 瓒呯簿瀵嗗畾浣�
銆�銆�鍦ㄥ畾浣嶆妧琛�(sh霉)涓� ,鍒╃敤鍌崇当(t菕ng)鐨勫畾浣嶈缃� ,濡傛痪鍕�(d貌ng)鎴栨粦鍕�(d貌ng)灏�(d菐o)杌�銆佺簿瀵嗚灪鏃嬫濉婃(j墨)妲�(g貌u)銆佹甫杓� 鈥斿嚬杓(j墨)妲�(g貌u)榻掕吉 鈥旀潬妗垮紡姗�(j墨)妲�(g貌u)绛夋(j墨)姊板偝鍕�(d貌ng)寮忓井浣嶇Щ椹�(q奴)鍕�(d貌ng)鍣ㄦ(g貌u)鎴愬畾浣嶆(j墨)妲�(g貌u) ,鐢变簬瀛樺湪钁楄純澶х殑闁撻殭鍜屾懇鎿� ,鎵�浠ョ劇(w煤)娉曞(sh铆)鐝�(xi脿n)瓒呯簿瀵嗗畾浣�銆傝�岄噰鐢ㄥ闆婚﹨(q奴)鍕�(d貌ng)鍣ㄧ祼(ji茅)鍚堟煍鎬ч壐閺堟斁澶ф(j墨)妲�(g貌u) ,鍙互鍏嬫湇涓婅堪缂洪粸(di菐n)鑰屽(sh铆)鐝�(xi脿n)寰磵绫崇礆(j铆)鐨勮秴绮惧瘑瀹氫綅銆傛椤�(l猫i)鎶�琛�(sh霉)涓� ,绮惧瘑寰嫊(d貌ng)宸ヤ綔鑷�(t谩i)鐨勭爺鍒堕枊(k膩i)鐧�(f膩)宸茬稉(j墨ng)鎴愮偤鐣�(d膩ng)浠婂湅(gu贸)鍏�(n猫i)澶栫爺绌剁殑鐔遍粸(di菐n)鍟�(w猫n)椤屼箣涓� ,涓嶆柗鍦板嚭鐝�(xi脿n)鏂扮殑褰㈠紡 ,瀹冨�戝ぇ澶氫互鏌旀�ч壐閺堢偤灏�(d菐o)鍚戞(j墨)妲�(g貌u) ,鐢卞闆婚﹨(q奴)鍕�(d貌ng)鍣ㄩ��(j矛n)琛岄﹨(q奴)鍕�(d貌ng)銆傛椤�(l猫i)宸ヤ綔鑷�(t谩i)宸辫寤ｆ硾鐢ㄤ簬鑳芥潫鍔犲伐銆佽秴绮惧瘑妾㈡脯(c猫)銆佸井鎿嶄綔绯荤当(t菕ng)绛夎姹傚叿鏈夌磵绫崇礆(j铆)瀹氫綅鍒嗚鲸鐜囩殑鎶�琛�(sh霉)闋�(l菒ng)鍩熶腑銆�
銆�銆�3 瓒呯簿瀵嗘(j墨)姊板姞宸�
銆�銆�瓒呯簿瀵嗗姞宸ユ妧琛�(sh霉)鍦ㄨ埅澶╃敘(ch菐n)鍝佸拰鐝�(xi脿n)浠ｅ寲绮惧瘑鍒堕�犱腑鍗犳湁闈炲父閲嶈鐨勫湴浣� ,杩戝崄骞惧勾渚�(l谩i)涓栫晫鍚勫湅(gu贸)閮藉崄鍒嗛噸瑕栬秴绮惧瘑鍔犲伐鎶�琛�(sh霉)鐨勭爺绌跺拰鐧�(f膩)灞� ,缇庡湅(gu贸)鏈�鏃╂垚绔嬩簡 Nano 鐮旂┒涓績 ,鑻卞湅(gu贸)鍒跺畾浜� ERATO(Ex2ploratory Research for Advanced Technology) 瑕�(gu墨)鍔冪瓑銆傚井閫�(j矛n)绲︽(j墨)妲�(g貌u)鍦ㄨ秴绮惧瘑鍔犲伐闋�(l菒ng)鍩熺嵅寰楀唬娉涙噳(y墨ng)鐢� ,涓�鑸鐢ㄤ締(l谩i)浣滅偤寰��(j矛n)绲︽垨瑁�(b菙)鍎熷伐鍏� ,鐩墠浣跨敤鏈�澶氱殑渚挎槸浠ュ闆婚櫠鐡风偤椹�(q奴)鍕�(d貌ng)鍣ㄧ殑鍩轰簬褰堟�ч壐閺堟敮鎾愪綅绉绘(j墨)妲�(g貌u)銆傛棩鏈澅浜伐妤�(y猫)澶у(xu茅)鐢ㄥ闆婚櫠鐡峰井閫�(j矛n)绲︽(j墨)妲�(g貌u)瑁�(b菙)鍎熸埃娴皫(d菐o)杌岄亱(y霉n)鍕�(d貌ng)鐩寸窔搴� ,鍙皣鐩寸窔搴︽彁楂樺埌0. 14渭m/600mm銆傜編 鍦�(gu贸) 鐨� 鍏� 瀛�(xu茅) 閲� 鍓� 鐭� 杌�(ch膿) 搴�(LODTM) 涓婄敤鐨勫揩閫熼亾鍏蜂己鏈嶆(j墨)妲�(g貌u)(FTS) 鍦� 卤1127渭m 鑼冨湇鍏�(n猫i)鍒嗚鲸鐜囬仈(d谩) 2. 5nm ,闋荤巼闊挎噳(y墨ng)閬�(d谩)100Hz ,鍙��(j矛n)琛屼富杌稿洖杞�(zhu菐n)瑾ゅ樊鐨勮(b菙)鍎� (杞�(zhu菐n)閫熷湪 1.50r/ min 浠ヤ笅) 銆傞毃钁楄秴澶ц(gu墨)妯￠泦鎴愰浕璺殑鐧�(f膩)灞曞強寰瀷姗�(j墨)姊扮殑瑕佹眰 ,瓒呯簿瀵嗗姞宸ユ妧琛�(sh霉)姝ｅ緸浜炲井绫崇礆(j铆)鍚戠磵绫崇礆(j铆)鐧�(f膩)灞曘��
銆�銆�4 寰瀷姗�(j墨)姊�
銆�銆�浣滅偤椹�(q奴)鍕�(d貌ng)閮ㄤ欢 ,澹撻浕闄剁摲鍦ㄥ井鍨嬫(j墨)姊扮暥(d膩ng)涓噳(y墨ng)鐢ㄩ潪甯稿唬娉�銆傚唬鏉卞伐妤�(y猫)澶у(xu茅)鑸囨棩鏈瓚娉㈠ぇ瀛�(xu茅)鍚堜綔 ,宸茬爺鍒跺嚭涓�缍�佷簩缍伅(li谩n)鍕�(d貌ng)澹撻浕椹�(q奴)鍕�(d貌ng)鍣� ,鍏朵綅绉昏寖鍦嶇偤10 脳10渭m ,浣嶇Щ鍒嗚鲸鐜囩偤 0.01渭m ,绮惧害鐐� 0.1渭m ,鐢ㄤ簬寰瀷姗�(j墨)鍣ㄤ汉鐨勯﹨(q奴)鍕�(d貌ng);闀�(zh菐ng)鏄ュ厜瀛�(xu茅)绮惧瘑姗�(j墨)姊扮爺绌舵墍鐮斿埗鍑虹殑鐩村緫 <3mm 鐨勫闆昏秴鑱查Μ閬�(d谩);鏃ユ湰鏉变含澶у(xu茅)宸ョ鐮旂┒鎵�鐮斿埗鍑哄埄鐢ㄥ闆婚櫠鐡峰揩閫熻畩褰㈢殑娌栨搳椹�(q奴)鍕�(d貌ng)姗�(j墨)妲�(g貌u)(IDM) ,骞堕�氶亷(gu貌) IDM 鍒舵垚浜嗗叐绋(l猫i)鍨嬬殑寰瀷姗�(j墨)鍣ㄤ汉(涓�绋偤涓夎嚜鐢卞害 ,鍙︿竴绋偤鍥涜嚜鐢卞害) 銆傚湪姗�(j墨)鍣ㄤ汉鐨勭閮ㄦ渶灏忔閫�(j矛n)閬�(y霉n)鍕�(d貌ng)灏忎簬 0. 1nm ,閫熷害澶т簬 2mm/ s,骞跺皣瀹冨�戞垚鍔熷湴鐢ㄥ湪灏�(du矛)绱�(x矛)鑳炵殑鎿嶄綔涓��
銆�銆�鎴戝湅(gu贸)鍦ㄥ井鍨嬫(j墨)姊伴牁(l菒ng)鍩� ,涔熶笉鏂峰嚭鐝�(xi脿n)鏂扮殑鎴愬姛 ,濡傚闆昏秴鑱查Μ閬�(d谩)銆佸井鍨嬫(j墨)鍣ㄤ汉銆佸井灏忓ぞ鎸佸櫒绛� 渚嬪,涓婃捣浜ら�氬ぇ瀛�(xu茅)鐮斿埗鐨勫闆诲紡寰瀷鍙帶閼峰瓙銆�
