銆�銆�棣栧厛鎴戝�戠⒑瀹氫竴鍊�(g猫)鎬濊矾锛氬厛鍒嗘瀽骞跺垪鑸夊厜瀛愮稉(j墨ng)閬�(gu貌)闈炴櫠纭呴浕姹犳檪(sh铆)涓昏鎼嶅け锛岀劧鍚庡氨鍚勯粸(di菐n)寰楀嚭鐩告噳(y墨ng)鐨勫皪(du矛)绛栦互閬垮厤鎴栨笡灏戞悕澶�銆�
銆�銆�1.娆犺兘鍜岄亷(gu貌)鑳芥悕澶憋細
銆�銆�鍗宠兘閲忎綆浜庡付闅欑殑鍏夊瓙鍜岃兘閲忛珮鍑哄付闅欑殑鍏夊瓙銆傚湪鏅剁闆绘睜閲�锛屽儏閫欏叐闋�(xi脿ng)鎼嶅け灏辨悕澶辨帀鐧惧垎涔嬪叚鍗佸咕鐨勫厜鐓ц兘閲忊�斺�旂浉鐣�(d膩ng)鍙(gu膩n)鐨勬暩(sh霉)瀛�;鍦ㄩ潪鏅剁闆绘睜閲�锛岄�欏��(g猫)鏁�(sh霉)瀛楁噳(y墨ng)瑭茬暐鏈変笉鍚�锛屼絾鐩镐俊宸笉浜嗗灏�锛岄亾鐞嗘槸涓�妯ｇ殑銆傛墍浠ュ��(g猫)浜鸿獚(r猫n)鐐�锛屾妸鎻愬崌鏁堢巼鐨勪富瑕佹敞鎰忓姏鏀惧湪閫欓噷锛屽湪閫欏叐闋�(xi脿ng)涓皨鎵剧獊鐮�锛岄偅灏囨槸璺宠簫寮忕殑閫�(j矛n)姝�銆�
銆�銆�2.涓茶伅(li谩n)闆婚樆鍒嗗鎼嶅け鍜屽苟鑱�(li谩n)闆婚樆鍒嗘祦鎼嶅け锛岃�屼覆鑱�(li谩n)闆婚樆涓昏鏄寘鎷浕妤靛湪鍏�(n猫i)鐨勫悇鍗�(q奴)楂旈浕闃诲拰鍚勫��(g猫)浜ょ晫闈㈢殑鎺ヨЦ闆婚樆--姝ら浕闃荤暥(d膩ng)鐒惰秺灏忚秺濂�;骞惰伅(li谩n)闆婚樆鍒嗘祦鍓囦富瑕佹槸闆绘睜琛ㄩ潰鐨勬紡闆绘祦鍜孭N绲�(ji茅)鍗�(q奴)瀛樺湪闆滆唱(zh矛)鍜岀己闄峰紩璧风殑婕忛浕娴�锛屼篃鍙互绨�(ji菐n)鍠殑瑾�(shu艒)鏄墠銆佽儗琛ㄩ潰寰�(f霉)鍚堝拰绲�(ji茅)鍗�(q奴)寰�(f霉)鍚堜腑蹇冨京(f霉)鍚堟悕澶�銆� 閫欎竴闋�(xi脿ng)鎼嶅け涔熷崰鏈夋瘮杓冨ぇ鐨勬瘮閲嶃��
銆�銆�3.鍙嶅皠鎼嶅け
銆�銆�4.鍏夌敓杓夋祦瀛愰倓鏈締(l谩i)寰楀強琚玃N绲�(ji茅)鍒嗛洟渚垮京(f霉)鍚堟帀浜�
銆�銆�5.鏆楅浕娴佸垎娴佹悕澶�銆�
銆�銆�灏�(du矛)绛栧強瑙ｆ焙鏂规硶锛�
銆�銆�灏�(du矛)浜�1.鐩墠鏈�甯哥敤鐨勬槸澶氬堡绲�(ji茅)妲�(g貌u)锛屼笉鍚屽付闅欑殑鏉愭枡鎸夌収寰炲ぇ鍒板皬鐨勯爢搴忚嚜涓婅�屼笅渚濇鎺掑垪锛岄珮鑳藉厜瀛愯鐩告噳(y墨ng)鐨勫甯堕殭灞ゅ惛鏀讹紝浣庤兘鍏夊瓙琚浉鎳�(y墨ng)鐨勭獎甯堕殭灞ゅ惛鏀�銆傜敱姝ゆ嫇瀵簡鍏夎瓬闊挎噳(y墨ng)鐨勮寖鍦嶏紝鐞嗘兂鐨勬儏娉佹槸锛屽湪鏁村��(g猫)寰炵传澶栧埌绱呭鍏夎瓬鍗�(q奴)鍩熶笂閮借兘寰楀埌鏈夋晥鐨勫惛鏀躲�傚彟澶栧湪閫欓粸(di菐n)涓�锛屾湰浜烘湁鍊�(g猫)瑷�(sh猫)鎯筹細PIN绲�(ji茅)妲�(g貌u)涓紝P銆丯鍏╁堡鏄仛鐐衡�滄灞も�濊�屽瓨鍦ㄧ殑锛屼富瑕佽捣鎻愪緵闆诲牬(ch菐ng)鐨勪綔鐢紝鑰屼粬鍊戝崁(q奴)鍩熷収(n猫i)鐨勮級娴佸瓙灏�(du矛)鍏夐浕娴佸咕涔庝笉璧蜂綔鐢�锛岄偅涔堟垜鍊戣兘涓嶈兘璁撲粬鍊戣畩鎴愨�滄椿灞も�濓紝涔熷皪(du矛)鍏夐浕娴佽捣璨㈢嵒(xi脿n)锛屾瘮濡侾銆丯鍏╁堡閮界敤寰櫠纭呮垨鑰呯磵绫崇銆�
銆�銆�灏�(du矛)浜�2. 閫欓噷娑夊強鍒板鍊�(g猫)鏂归潰锛�
銆�銆�棣栧厛闄嶄綆鍚勫崁(q奴)鍖呮嫭闆诲瓙鍦ㄥ収(n猫i)鐨勯珨闆婚樆锛屼富瑕佹槸鍗婂皫(d菐o)楂斿堡鐨勯浕闃�锛岄偅涔堝氨瑕佹眰闆婚樆鐜囩洝閲忓皬锛屾牴鎿�(j霉)鍗婂皫(d菐o)楂旂墿鐞嗗(xu茅)锛屽婧笅锛屽鍔犳懟闆滄績搴�(鎴栬�呭悓鎽婚洔涓嬬洝閲忛檷浣庡伐浣滄韩搴�)鍙互娓涘皬闆婚樆鐜囥��(浣嗘懟闆滈亷(gu貌)楂樻渻(hu矛)寮曡捣閬�(gu貌)鎽婚洔鏁堟噳(y墨ng)锛屾墍浠ヨ鈥滈仼鐣�(d膩ng)鈥�)
銆�銆�鍏舵鐐烘笡灏戠晫闈㈣檿鐨勬帴瑙搁浕闃�锛岄渶瑕佺洝鍙兘鐨勬笡灏戞櫠鏍煎け閰嶇瓑鍟�(w猫n)椤�锛屾瘮濡傛湁鍏徃鐢ㄧ殑a-SiC:H鍋氱獥鍙ｅ堡锛屽畠鍜屼笅闈灞ょ殑a-Si:H 灏卞瓨鍦ㄨ憲涓�瀹氱殑鏅舵牸澶遍厤?锛熸ⅱ閽ョ搐]鐢ㄦ矮鍖栫磵绫抽潪鏅剁鍋氱獥鍙ｅ堡锛岀敤寰櫠纭呮垨鑰呯磵绫崇鍋歅鍜孨灞�銆�
銆�銆�鍐嶆锛岀洝鍙兘鐨勬笡灏戣〃闈㈠京(f霉)鍚堝拰绲�(ji茅)鍗�(q奴)寰�(f霉)鍚堬紝涓�鑸殑鏂规硶鏄疕琛ㄩ潰閳嶅寲鍜孒灏�(du矛)鍏�(n猫i)閮ㄦ嚫鎺涢嵉鐨勯＝鍜�锛屼互鍙婇��(j矛n)鍙兘鐨勬笡灏慜銆丯 绛夐洔璩�(zh矛)浠ユ笡灏�?g貌u)?f霉)鍚堜腑蹇�銆傚湪閫欓粸(di菐n)涓�锛屾垜鍊�(g猫)浜虹殑鐨勬兂娉曟槸锛屼娇鐢ㄥ井娉㈤浕瀛愬洖鏃嬪叡鎸硶浠ｆ浛鐣�(d膩ng)鍓嶆櫘閬嶄娇鐢ㄧ殑PECVD--鍏╁ぇ鏄庨’鍎�(y艒u)鍕�(sh矛)锛� 涓�锛屽墠鑰呮槸鐒�(w煤)闆绘サ鏀鹃浕锛屽洜鑰岄伩鍏嶄簡鍥犲悗鑰呴浕妤靛紩鍏ョ殑闆滆唱(zh矛)銆備簩锛屾斁闆诲姛鐜囬珮锛屽苟鑳戒娇H姘ｉ檺搴︾殑闆㈣В锛屼篃妤靛ぇ鐨勯檷浣庝簡鐢变簬H姘ｅ紩鍏ョ殑涓�浜涚己闄锋厠(t脿i)锛岄��(j矛n)鑰屼竴瀹氱▼搴︿笂鎶戝埗浜哠-W鏁堟噳(y墨ng)銆�
銆�銆�灏�(du矛)浜�3. 闆绘睜涓婅〃闈綔鎴愮胆闈㈢殑闄峰厜绲�(ji茅)妲�(g貌u)+澧為�忚啘;闆绘睜鑳岄潰鍔犺儗鍙嶅皠灞�
銆�銆�灏�(du矛)浜�4. 澶氬堡鐨勫熀绀�(ch菙)涓婇仼鐣�(d膩ng)?sh霉)鑷弍钖処灞ょ殑鍘氬害浠ュ寮�(qi谩ng)闆诲牬(ch菐ng)寮�(qi谩ng)搴︼紝寰炶�屽寮�(qi谩ng)杓夋祦瀛愮殑鍚告敹
銆�銆�灏�(du矛)浜�5. 鏆楅浕娴佹槸鍏夌敓闆诲寮曞嚭鍒板闆昏矾涔嬪悗寮曡捣鐨勨�滄鍚戦浕娴佲��锛岃┎濡備綍娓涘皯鏈汉鏆笉鏄庣櫧銆�
